Crystal 12 Sensor
The INFICON Crystal 12 Sensor is designed for processes requiring continuous rate control, offering secure and automatic crystal replacement for extended operations.
Specification Snapshot
Insulators
Teflon
Insulators
Peek
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Overview
The INFICON Crystal 12 Sensor is designed for processes requiring continuous rate control, offering secure and automatic crystal replacement for extended operations.
Specifications
| Parameter | Value |
|---|---|
| Maximum Bakeout Temperature (No Water) | 130°C |
| Maximum Operating Isothermal Environment Temperature (Minimum Water Flow) | 300°C |
| Size (Maximum Envelope) | 4.0in(102mm)dia.x3.3in(84mm)high |
| Size (Maximum Envelope with Mounting Posts) | 4.75in(121mm)x3.46in(88mm) |
| Water and Air Length | 30in(762mm) |
| Crystal exchange | Front-loading |
| Weight | 4.92lb(2.23kg) |
| Installation Requirements - Feedthrough | Qty(1)2-3/4in.ConFlatwithonecoaxialfeedthrough,twopasswater,oneair,IPN750-685-G1;Qty(1)750-685-G2,withonecoaxialfeedthroughthreetubeUltra-Torrcompressionfittings;Qty(1)1in.boltwithonecoaxialfeedthrough,twopasswater,oneairIPN750-030-G1 |
| Installation Requirements - Mounting | User to provide mounting structure adequate to support weight of Crystal 12 |
| Air and Water Connections | User to provide vacuum-tight braze joints or connectors for the water and air tubes |
| Minimum Water Flow | 150-200cc/min |
| Coolant Temperature | 30°C max |
| Regulated Air Supply | 80-90PSIG(5.5-6.2bar) |
| Regulated Air Supply Unit | 550kPa-620kPa |
| Materials - Plate, Mechanical Parts, Body and Carousel | 304 type stainless steel |
| Materials - Springs, Electrical Contacts | Au plated Be-Cu, Au Plated 302 stainless steel |
| Materials - Water and Air Tubes | S-304,0.125in(3.2mm)O.D.x0.016in(0.4mm)WallThicknessx30in(762mm) |
| Connector | Stainless steel |
| Insulators | Teflon |
| Insulators | Peek |
| Cable | Teflon insulated copper plated steel |
| Crystal Diameter | 0.550in(13.97mm) |
Applications
1. OLED manufacturing 2. MBE processes 3. Solar panel production 4. Continuous deposition rate monitoring
Key Features
1. Holds 12 crystals with robust, automatic switching to maximize process uptime 2. Easy-to-remove carousel allows fast replacement of all 12 crystals 3. Stable crystal temperature due to pneumatically-driven switching 4. 1/8in tubes maintain thermal stability and allow flexibility in sensor placement 5. Easy-to-remove front deposition shield protects crystals and carousel from material accumulation 6. Optional mounting-post kit can be user-modified to accommodate metric hardware 7. Optional crystal shutter available
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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