ALD Sensors and High Temperature Crystals
INFICON ALD Sensors provide repeatability, precision, and durability for quartz crystal microbalance (QCM) measurements in atomic layer deposition (ALD) applications. These sensors are designed to operate in harsh environments and withstand temperatures up to 450°C.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Temperature (Welded ALD Sensor) | 450°C continuous |
| Maximum Temperature (Adjustable ALD Sensor) | 130°C continuous |
| Feedthrough | 2 3/4 in. ConFlat |
| Sensor/Feedthrough Connection (Welded ALD Sensor) | Welded (no fillers) |
| Sensor/Feedthrough Connection (Adjustable ALD Sensor) | O-ring compression fittings |
| Gas and Coax Tubes (Welded ALD Sensor) | Gas: 3.2mm (1/8 in.) OD (vacuum side), 6.4mm (1/4 in.) OD (atmosphere side); Coax: 4.8mm (3/16 in.) OD |
| Gas and Coax Tubes (Adjustable ALD Sensor) | Gas: 3.2mm (1/8 in.) OD; Coax: 4.8mm (3/16 in.) OD |
| Sensor Head Size (Maximum Envelope) | 34x35x24mm (1.35x1.38x0.94 in.) |
| Crystal exchange | Front loading, self-contained package, cam-type locking handle |
| Mounting | Four #4-40 tapped holes on back of sensor body |
| Materials (Body and Holder) | 304 type stainless steel |
| Materials (Springs) | Molybdenum and Inconel X-750 |
| Materials (Gas and Coax Tubes) | Seamless 304 stainless steel |
| Materials (Other Mechanical Parts) | 18-8 or 304 stainless steel |
| Materials (Insulators) | >99% Al2O3 in vacuum; other high-density ceramics used elsewhere |
| Materials (Wire) | 1 Ni (in vacuum), 2 Ni plated Cu (elsewhere) |
| Materials (Braze) | Vacuum process high-temperature Ni-Cr alloy |
| O-ring Compression Fittings | 304 stainless steel, Viton |
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