Turbo Molecular Pump
The Turbo Molecular Pump is a high-performance vacuum pump designed for applications requiring ultra-high vacuum conditions. It is widely used in scientific research, industrial processes, and semiconductor manufacturing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Pumping Speed (L/s) | 100-3000 |
| Ultimate Pressure (Pa) | <1x10^-7 |
| Rotation Speed (rpm) | 24000-60000 |
| Inlet Flange Size | DN63-DN250 |
| Outlet Flange Size | DN16-DN40 |
| Cooling Method | Air/Water |
| Weight (kg) | 10-50 |
| Power Supply (V) | 220 |
| Operating Temperature (°C) | 5-40 |
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Key Features
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