Sputter Ion Pump
The ULVAC Sputter Ion Pump is a high-performance vacuum pump designed for ultra-high vacuum applications. It offers reliable and efficient operation, making it suitable for various industrial and scientific uses.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Pumping Speed (Regeneration Pumping Speed) N2 | 0.03m³/s (CU·AU), 0.02m³/s (1×10⁻⁷Pa时) |
| Ultimate Pressure | 10⁻⁹Pa |
| Operating Pressure | <8.0×10⁻³Pa (Recommended Value), Maximum Operating Pressure 1×10⁻²Pa |
| Internal Volume | Approx. 6.7×10⁻⁴m³ |
| Number of Pump Units | CU Type Cell×1, AV Type Cell×1 |
| Flange Model | UFC070 |
| Applied Voltage | DC+7.5kV |
| Standard Back-out Temperature | 250°C |
| Weight | Approx. 9.5KG |
| Dimensions WxDxH | 103×183×187mm |
Applications
Key Features
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