PGT-3F/PGT-6F Titanium Sublimation Pump
The PGT-3F/PGT-6F Titanium Sublimation Pump is a high-performance vacuum pump designed for ultra-high vacuum applications. It is equipped with titanium filaments and offers excellent pumping speeds for various gases, ensuring efficient and reliable operation.
Specification Snapshot
Required Power
270W
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Overview
The PGT-3F/PGT-6F Titanium Sublimation Pump is a high-performance vacuum pump designed for ultra-high vacuum applications. It is equipped with titanium filaments and offers excellent pumping speeds for various gases, ensuring efficient and reliable operation.
Specifications
| Parameter | Value |
|---|---|
| Pumping Speed PGT-3F <20°C | 24m³/(s·m²) |
| Pumping Speed PGT-6F <-196°C | 64m³/(s·m²) |
| Operating Pressure Range | 10⁻¹ to 10⁻⁹Pa |
| Pumped Gases | H₂, N₂, O₂, H₂O, CO, CO₂ |
| Non-pumped Gases | He, Ne, Ar, CH₄, C₂H₆, other organic gases |
| Leak Rate | 1.3×10⁻¹¹Pa·m³/s or less |
| Backing Temperature | 250°C |
| Required Power | 270W |
| Filament Material | Ti alloy |
| Filament Lifetime | Approx. 75 hours continuous operation, approx. 25 hours continuous current |
| Number of Filaments PGT-3F | 3 |
| Number of Filaments PGT-6F | 6 |
| Connection Flange PGT-3F | UFC070-FH |
| Connection Flange PGT-6F | UFC114-FH |
| Weight PGT-3F | 1.0kg |
| Weight PGT-6F | 2.5kg |
| Model | GGT-3 |
| Output | AC0~6V, max 60A |
| Control Method | Timer ON/OFF control |
| Timer Setting Time Range | 0.05s~300s (ON/OFF total) |
| Output Display | Output current display |
| Output Display Scale | Analog display/60A range |
| Inter-Lock Input | 1 point |
| Permissible Ambient Temperature | 5~40°C |
| Input Voltage and Frequency | Single-phase AC200V~220V, 50/60Hz switchable |
| Input Current | Max 3.5A |
| Weight | 12kg |
Applications
1. Ultra-high vacuum systems 2. Semiconductor manufacturing 3. Surface analysis systems 4. Research and development laboratories
Key Features
1. High pumping speed for various gases 2. Durable titanium filaments 3. Suitable for ultra-high vacuum applications 4. Compact and lightweight design
Datasheet
Product Datasheet
PDF
Supplier Information
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>
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