PGT-3F/PGT-6F Titanium Sublimation Pump

PGT-3F/PGT-6F Titanium Sublimation Pump

Supplier
UlvacShanghai
Part Number
PGT-3F/PGT-6F Titanium Sublimation Pump
Category
Tools and Machinery
Origin
China

The PGT-3F/PGT-6F Titanium Sublimation Pump is a high-performance vacuum pump designed for ultra-high vacuum applications. It is equipped with titanium filaments and offers excellent pumping speeds for various gases, ensuring efficient and reliable operation.

Specification Snapshot
Required Power
270W
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Overview

The PGT-3F/PGT-6F Titanium Sublimation Pump is a high-performance vacuum pump designed for ultra-high vacuum applications. It is equipped with titanium filaments and offers excellent pumping speeds for various gases, ensuring efficient and reliable operation.

Specifications

ParameterValue
Pumping Speed PGT-3F <20°C24m³/(s·m²)
Pumping Speed PGT-6F <-196°C64m³/(s·m²)
Operating Pressure Range10⁻¹ to 10⁻⁹Pa
Pumped GasesH₂, N₂, O₂, H₂O, CO, CO₂
Non-pumped GasesHe, Ne, Ar, CH₄, C₂H₆, other organic gases
Leak Rate1.3×10⁻¹¹Pa·m³/s or less
Backing Temperature250°C
Required Power270W
Filament MaterialTi alloy
Filament LifetimeApprox. 75 hours continuous operation, approx. 25 hours continuous current
Number of Filaments PGT-3F3
Number of Filaments PGT-6F6
Connection Flange PGT-3FUFC070-FH
Connection Flange PGT-6FUFC114-FH
Weight PGT-3F1.0kg
Weight PGT-6F2.5kg
ModelGGT-3
OutputAC0~6V, max 60A
Control MethodTimer ON/OFF control
Timer Setting Time Range0.05s~300s (ON/OFF total)
Output DisplayOutput current display
Output Display ScaleAnalog display/60A range
Inter-Lock Input1 point
Permissible Ambient Temperature5~40°C
Input Voltage and FrequencySingle-phase AC200V~220V, 50/60Hz switchable
Input CurrentMax 3.5A
Weight12kg

Applications

1. Ultra-high vacuum systems 2. Semiconductor manufacturing 3. Surface analysis systems 4. Research and development laboratories

Key Features

1. High pumping speed for various gases 2. Durable titanium filaments 3. Suitable for ultra-high vacuum applications 4. Compact and lightweight design

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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PGT-3F/PGT-6F Titanium Sublimation Pump
UlvacShanghai · Tools and Machinery
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