EGO-1G and EGO-40M

EGO-1G and EGO-40M

Supplier
UlvacShanghai
Part Number
EGO-1G and EGO-40M
Category
Automation and Control
Origin
China

EGO-1G and EGO-40M are advanced optical devices designed for precision applications, offering high performance and reliability.

Request a Quote Download Datasheet Chat
Save to Favorites Save to Favorites

Overview

EGO-1G and EGO-40M are advanced optical devices designed for precision applications, offering high performance and reliability.

Specifications

ParameterValue
Electron Beam Deflection Angle270°
Number of Crucibles EGO-40M4
Crucible Capacity EGO-40M10cc×2/40cc×2
Crucible Size: Top×Bottom×Depth EGO-40M32Φ×24Φ×15H(mm)/50Φ×41Φ×25H(mm)
Cooling Water Flow (Furnace Side) EGO-40M10L/min以上
Cooling Water Flow (Other)2L/min
Dimensions (W×D×H) Excluding Protrusions EGO-1G166W×285D×174H(mm)
Dimensions (W×D×H) Excluding Protrusions EGO-40M170W×309D×174H(mm)
Weight EGO-1G约12.5公斤
Weight EGO-40M约18公斤
Maximum Acceleration Voltage-10kV
Maximum Emission Current EGO-1G1.0A
Maximum Emission Current EGO-40M0.6A/1.0A
Applicable Power SupplyHPS-1000N-100/HPS-1000N-200

Applications

1. Semiconductor manufacturing 2. Thin film deposition 3. Research and development

Key Features

1. High precision electron beam deflection 2. Multiple crucible options for versatile applications 3. Compact and lightweight design 4. Efficient cooling system

Datasheet

Product Datasheet
PDF
Download

Supplier Information

Ul
UlvacShanghai
View Supplier →
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

Request a Quote

Our team responds within 24–48 hours
EGO-1G and EGO-40M
UlvacShanghai · Automation and Control
Direct from Manufacturer
Your inquiry will be sent directly to the manufacturer
Photonics Source Platform
We handles the inquiry on your behalf
Your information is protected and will never be shared without consent.
Contact Us

Loading...

GetExperimental Plan

Name

Phone

+86

Organization

Use Case

AI Parametric Selection
Smart Match · Precise Recs
Enter Specifications
AI Smart Matching
Get Best Matches
Skip Manual Comparison
Find Best Solutions Fast
Select Now →