EGO-1G and EGO-40M
EGO-1G and EGO-40M are advanced optical devices designed for precision applications, offering high performance and reliability.
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Overview
EGO-1G and EGO-40M are advanced optical devices designed for precision applications, offering high performance and reliability.
Specifications
| Parameter | Value |
|---|---|
| Electron Beam Deflection Angle | 270° |
| Number of Crucibles EGO-40M | 4 |
| Crucible Capacity EGO-40M | 10cc×2/40cc×2 |
| Crucible Size: Top×Bottom×Depth EGO-40M | 32Φ×24Φ×15H(mm)/50Φ×41Φ×25H(mm) |
| Cooling Water Flow (Furnace Side) EGO-40M | 10L/min以上 |
| Cooling Water Flow (Other) | 2L/min |
| Dimensions (W×D×H) Excluding Protrusions EGO-1G | 166W×285D×174H(mm) |
| Dimensions (W×D×H) Excluding Protrusions EGO-40M | 170W×309D×174H(mm) |
| Weight EGO-1G | 约12.5公斤 |
| Weight EGO-40M | 约18公斤 |
| Maximum Acceleration Voltage | -10kV |
| Maximum Emission Current EGO-1G | 1.0A |
| Maximum Emission Current EGO-40M | 0.6A/1.0A |
| Applicable Power Supply | HPS-1000N-100/HPS-1000N-200 |
Applications
1. Semiconductor manufacturing 2. Thin film deposition 3. Research and development
Key Features
1. High precision electron beam deflection 2. Multiple crucible options for versatile applications 3. Compact and lightweight design 4. Efficient cooling system
Datasheet
Product Datasheet
PDF
Supplier Information
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>
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