ST2
The ST2 series is a high-precision vacuum gauge designed for accurate pressure measurement in various industrial applications. It features advanced sensor technology and robust construction.
Specification Snapshot
Type
Standard type
Type
Communication type
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Overview
The ST2 series is a high-precision vacuum gauge designed for accurate pressure measurement in various industrial applications. It features advanced sensor technology and robust construction.
Specifications
| Parameter | Value |
|---|---|
| Model | ST2-1, ST2-2 |
| Type | Standard type |
| Type | Communication type |
| Connectable Sensors | SPU (Skin Pirani Vacuum Gauge), SAU (Pressure Sensor Unit) |
| Pressure Measurement Range | 1×10^-5~1×10^1Pa (ST2-1), 1×10^-3~3×10^1Pa (ST2-2) |
| Measurement Accuracy | 1×10^-3~3Pa ±10% |
| Repeatability | 1×10^-4~3Pa ±2% |
| Sampling Time | 70ms (4-point averaging) |
| Measurement Output | DC 0~10V, LOG output 0.75V/1 digit |
| Update Time | 50ms |
| Control Input Signal | FIL ON/OFF, FIL 1/2, DEGAS ON/OFF |
| Control Output Signal | Sensor report, filament monitoring, 24Vmax, 50mAmax, filament voltage 1V |
| Serial Communication Specifications | RS232C/RS-485 |
| LED Display | SET1, SET2, SET3 |
| Emission Current | 2mA (1×10^-3Pa or less), 10μA |
| DEGAS | Electron impact degas mode, emission current 2mA, filament voltage 330V |
| Sensor Pressure Resistance | 2×10^5Pa (absolute pressure) |
| Sensor Internal Volume | SWT-16: 17cm^3 |
| Operating Temperature Range | 10~50°C |
| Operating humidity range | 15~80% (non-condensing) |
| Storage Temperature | -20~65°C (non-condensing) |
| IP Protection Rating | IP30 |
| Power Supply Voltage | DC20~28V |
| Power Supply Voltage Noise | 1% or less |
| Power Consumption | 19W or less (normal operation), 156W (DEGAS mode) |
| Stabilization Time | 8W, DEGAS 18W, input power 6A or less (4ms) |
| Input/Output Connection | D-sub15 Pin (M2.6 screws) |
| Main Unit Weight | 530g |
| Sensor Unit Weight | 80g |
| Dimensions WxDxH | 183.8mm×75mm×62mm |
| Certification | CE |
| Sensor Model | SWT-16 (NW16) |
| Sensor Material | Filament: Pt-Ir/Y2O3, others: PtC-Mo, SUS304, Kovar glass, Kovar/Ni |
| Pirani Vacuum Gauge Model | SPU WP-16 (NW16) |
| Pirani Vacuum Gauge Material | Filament: Pt, others: BS/Ni, electrode: Ni, weld point |
| Atmospheric Pressure Sensor Model | SAU (NW16) |
| Atmospheric Pressure Sensor Material | SUS316L |
| Display Unit | 1CH: Model ISG1 (DC24V), 4CH: Model IMR1 (DC24V), Model IMR1 (AC100V) |
| Display Unit Cable | 2m, 5m, 10m, 15m, 20m |
| Interface | D-sub15-socket (M2.6 screws) |
| Others | Inspection certificate |
| Others | general inspection certificate |
| Others | JCSS calibration certificate |
Applications
1. Semiconductor manufacturing 2. Vacuum coating processes 3. Research laboratories 4. Industrial vacuum systems
Key Features
1. High precision pressure measurement 2. Wide pressure range 3. Fast response time 4. Robust construction
Datasheet
Product Datasheet
PDF
Supplier Information
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>
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