ST2

ST2

Supplier
UlvacShanghai
Part Number
ST2
Category
Other
Origin
China

The ST2 series is a high-precision vacuum gauge designed for accurate pressure measurement in various industrial applications. It features advanced sensor technology and robust construction.

Specification Snapshot
Type
Standard type
Type
Communication type
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Overview

The ST2 series is a high-precision vacuum gauge designed for accurate pressure measurement in various industrial applications. It features advanced sensor technology and robust construction.

Specifications

ParameterValue
ModelST2-1, ST2-2
TypeStandard type
TypeCommunication type
Connectable SensorsSPU (Skin Pirani Vacuum Gauge), SAU (Pressure Sensor Unit)
Pressure Measurement Range1×10^-5~1×10^1Pa (ST2-1), 1×10^-3~3×10^1Pa (ST2-2)
Measurement Accuracy1×10^-3~3Pa ±10%
Repeatability1×10^-4~3Pa ±2%
Sampling Time70ms (4-point averaging)
Measurement OutputDC 0~10V, LOG output 0.75V/1 digit
Update Time50ms
Control Input SignalFIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Control Output SignalSensor report, filament monitoring, 24Vmax, 50mAmax, filament voltage 1V
Serial Communication SpecificationsRS232C/RS-485
LED DisplaySET1, SET2, SET3
Emission Current2mA (1×10^-3Pa or less), 10μA
DEGASElectron impact degas mode, emission current 2mA, filament voltage 330V
Sensor Pressure Resistance2×10^5Pa (absolute pressure)
Sensor Internal VolumeSWT-16: 17cm^3
Operating Temperature Range10~50°C
Operating humidity range15~80% (non-condensing)
Storage Temperature-20~65°C (non-condensing)
IP Protection RatingIP30
Power Supply VoltageDC20~28V
Power Supply Voltage Noise1% or less
Power Consumption19W or less (normal operation), 156W (DEGAS mode)
Stabilization Time8W, DEGAS 18W, input power 6A or less (4ms)
Input/Output ConnectionD-sub15 Pin (M2.6 screws)
Main Unit Weight530g
Sensor Unit Weight80g
Dimensions WxDxH183.8mm×75mm×62mm
CertificationCE
Sensor ModelSWT-16 (NW16)
Sensor MaterialFilament: Pt-Ir/Y2O3, others: PtC-Mo, SUS304, Kovar glass, Kovar/Ni
Pirani Vacuum Gauge ModelSPU WP-16 (NW16)
Pirani Vacuum Gauge MaterialFilament: Pt, others: BS/Ni, electrode: Ni, weld point
Atmospheric Pressure Sensor ModelSAU (NW16)
Atmospheric Pressure Sensor MaterialSUS316L
Display Unit1CH: Model ISG1 (DC24V), 4CH: Model IMR1 (DC24V), Model IMR1 (AC100V)
Display Unit Cable2m, 5m, 10m, 15m, 20m
InterfaceD-sub15-socket (M2.6 screws)
OthersInspection certificate
Othersgeneral inspection certificate
OthersJCSS calibration certificate

Applications

1. Semiconductor manufacturing 2. Vacuum coating processes 3. Research laboratories 4. Industrial vacuum systems

Key Features

1. High precision pressure measurement 2. Wide pressure range 3. Fast response time 4. Robust construction

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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