Precision Vertical Stage

: 13 : 26 : -6.5~6.5mm

: 13 : 13.5 : -6.5~6.5mm

Unidirectional Position Repeatability (XYZ 50/50/50mm Model): ±50nm XYZ Effective Travel (XYZ 50/50/50mm Model): 50/50/50mm XYZ Thrust (XYZ 50/50/50mm Model): 26/26/26N

The 3-Axis Slide Stage Combination Series from LASER X (Leishen Technology (Shenzhen) Co., Ltd.) is a family of integrated XYZ precision positioning stages engineered for high-accuracy multi-axis motion control in optoelectronic applications. All models deliver a unidirectional position repeatability of ±50nm and are available in four travel/thrust configurations: XYZ 50/50/50mm (26/26/26N, 10kg load), XYZ 110/50/50mm (35/26/26N, 10kg load), XYZ 50/50/20mm (26/26/26N, 6kg load) and XYZ 110/50/20mm (35/26/26N, 6kg load). The compact stacked combination architecture integrates X, Y and Z axes into a rigid mechanical assembly, providing stable, repeatable three-dimensional positioning for optical alignment, laser processing, inspection and precision assembly systems.

XYZ Unidirectional Position Repeatability: ±50nm θxθyθz Unidirectional Position Repeatability: ±0.003~0.005° XYZ Thrust: 26(35)/26(35)/26N

The Slide Stage Combination Type 6-Axis Series from LASER X is a modular precision positioning platform that integrates XYZ linear motion with θx/θy/θz angular adjustment for optical and laser alignment tasks. The series provides ±50nm XYZ unidirectional position repeatability, ±0.003~0.005° angular repeatability, 26(35)/26(35)/26N XYZ thrust, 5~8° angular travel and up to 6kg horizontal load. X/Y effective travel is 50mm with 110mm optional, while Z travel is shown as 20mm for the compact stacked configuration and 50mm for the raised combination configuration.

Repeatability ART060-CM5-L/R: ±0.003° Effective Travel ART060-CM5-L/R: ±5.5° Maximum Horizontal Load ART060-CM5-L/R: 6kg

High-precision motorized angle (goniometer) slide stages from LASER X, including the ART060-CM5-L/R, ART070S-CM5-L/R and AAT60-(050/075/100/125)-CM5-L/R models. They deliver fine angular positioning with repeatability down to ±0.003°, effective travel from ±5° up to ±8°, and maximum horizontal loads of 5-6kg, with left/right (L/R) motor configurations for flexible optical integration.