Slide Stage Combination Type 6-Axis Series
The Slide Stage Combination Type 6-Axis Series from LASER X is a modular precision positioning platform that integrates XYZ linear motion with θx/θy/θz angular adjustment for optical and laser alignment tasks. The series provides ±50nm XYZ unidirectional position repeatability, ±0.003~0.005° angular repeatability, 26(35)/26(35)/26N XYZ thrust, 5~8° angular travel and up to 6kg horizontal load. X/Y effective travel is 50mm with 110mm optional, while Z travel is shown as 20mm for the compact stacked configuration and 50mm for the raised combination configuration.
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Overview
The Slide Stage Combination Type 6-Axis Series from LASER X is a modular precision positioning platform that integrates XYZ linear motion with θx/θy/θz angular adjustment for optical and laser alignment tasks. The series provides ±50nm XYZ unidirectional position repeatability, ±0.003~0.005° angular repeatability, 26(35)/26(35)/26N XYZ thrust, 5~8° angular travel and up to 6kg horizontal load. X/Y effective travel is 50mm with 110mm optional, while Z travel is shown as 20mm for the compact stacked configuration and 50mm for the raised combination configuration.
Specifications
| Parameter | Value |
|---|---|
| XYZ Unidirectional Position Repeatability | ±50nm |
| θxθyθz Unidirectional Position Repeatability | ±0.003~0.005° |
| XYZ Thrust | 26(35)/26(35)/26N |
| XYZ Effective Travel (Z-axis 20mm Configuration) | 50(110)/50(110)/20mm |
| XYZ Effective Travel (Z-axis 50mm Configuration) | 50(110)/50(110)/50mm |
| θxθyθz Travel | 5~8° |
| Maximum Horizontal Load Capacity | 6kg |
Applications
1. Precision laser processing and micromachining alignment 2. Optical device coupling and fiber-optic alignment 3. Semiconductor and photonics inspection or testing 4. Lens, camera and imaging-module assembly 5. Laboratory R&D, precision metrology and multi-axis adjustment
Key Features
1. Six-degree-of-freedom adjustment combining XYZ translation and θx/θy/θz rotation 2. Nanometer-level linear repeatability for high-resolution optical positioning 3. Fine angular repeatability for precise pitch, yaw and roll correction 4. Modular slide-stage combinations with multiple mounting and orientation options 5. Optional X/Y travel extension from 50mm to 110mm 6. Compact stacked and raised mechanical configurations for different Z-travel needs 7. Rigid black anodized structure suitable for laser, imaging and inspection workstations 8. Horizontal load capacity up to 6kg for common optomechanical payloads
Datasheet
Product Datasheet
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Supplier Information
LaserX Technology (Shenzhen) Co., Ltd. was established in October 2017, with its headquarters located in Yufengda Industrial Park, Guangming District, Shenzhen. It currently has a factory area of over 40,000 square meters and an annual production capacity of over 2,000 complete machines. The company is dedicated to providing precision automated testing and burn-in equipment, optical assembly equipment, and systematic solutions for optoelectronic chip manufacturing and packaging enterprises in fields such as optical communications, semiconductors, laser processing, and LiDAR. It is currently a national-level specialized and sophisticated "Little Giant" enterprise, a national high-tech enterprise, a Guangdong Province Manufacturing Single Champion Enterprise, and a Shenzhen Gazelle Enterprise.
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