Slide Stage Combination Type 6-Axis Series
The Slide Stage Combination Type 6-Axis Series from LASER X is a modular precision positioning platform that integrates XYZ linear motion with θx/θy/θz angular adjustment for optical and laser alignment tasks. The series provides ±50nm XYZ unidirectional position repeatability, ±0.003~0.005° angular repeatability, 26(35)/26(35)/26N XYZ thrust, 5~8° angular travel and up to 6kg horizontal load. X/Y effective travel is 50mm with 110mm optional, while Z travel is shown as 20mm for the compact stacked configuration and 50mm for the raised combination configuration.
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Overview
Specifications
| Parameter | Value |
|---|---|
| XYZ Unidirectional Position Repeatability | ±50nm |
| θxθyθz Unidirectional Position Repeatability | ±0.003~0.005° |
| XYZ Thrust | 26(35)/26(35)/26N |
| XYZ Effective Travel (Z-axis 20mm Configuration) | 50(110)/50(110)/20mm |
| XYZ Effective Travel (Z-axis 50mm Configuration) | 50(110)/50(110)/50mm |
| θxθyθz Travel | 5~8° |
| Maximum Horizontal Load Capacity | 6kg |
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Key Features
Datasheet
Supplier Information
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