YBC120TII High Vacuum Dual Magnetron Sputtering Coating Instrument
The YBC120TII is a high-performance vacuum coating instrument designed for precise and efficient magnetron sputtering applications. It features dual magnetron heads, supports single and dual sputtering, and offers advanced vacuum capabilities for superior coating results.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Dimensions | 278(L)×494(H)×467(D)mm |
| Target Material Size | Φ50mm, thickness 0.1-4mm |
| Operating Current | 1-200mA adjustable (step: 1mA) |
| Coating Time | 1-9999s adjustable (step: 1s) |
| Vacuum Pump | Rotary pump (optional dry pump) + molecular pump |
| Main Vacuum Pump Speed | 90L/s |
| Vacuum Chamber | 170(L)×150(H)×163.5(D)mm, integrated metal processing chamber |
| Ultimate Vacuum | ≤5×10⁻³Pa |
| Working Medium | Oxygen |
| Working Vacuum | 0.1-2Pa adjustable |
| Power Supply | AC220V/50Hz |
| Rated Power | <800W |
| Pre-sputtering | Fully automatic pre-sputtering system |
| Sample Stage Diameter | Φ80mm |
| Sample Stage Support Functions | Rotation |
| Sample Stage Support Functions | tilt adjustment |
| Operation Screen | 7-inch color touch screen |
| Operating Temperature | 15-30°C |
| Storage Temperature | 5-40°C |
| Ambient Humidity | ≤80% (recommended ≤50%) |
Applications
Key Features
Datasheet
Supplier Information
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