R50 Series Thin Film Sheet Resistance Mapping System
The Filmetrics R50 Series is an advanced thin film sheet resistance mapping system designed to measure sheet resistance and thickness of conductive thin films with high precision and flexibility.
Specification Snapshot
Maximum Measurement Diameter R50-4PP
100mm
Maximum Measurement Diameter R50-EC
100mm
Maximum Measurement Diameter R50-200-4PP
200mm
Maximum Measurement Diameter R50-200-EC
200mm
Maximum Measurement Diameter R54-200-4PP
200mm
Maximum Measurement Diameter R540-200-EC
200mm
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Overview
The Filmetrics R50 Series is an advanced thin film sheet resistance mapping system designed to measure sheet resistance and thickness of conductive thin films with high precision and flexibility.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range R50-4PP | 1mΩ/sq-200MΩ/sq |
| Measurement Range R50-EC | 1mΩ/sq-50Ω/sq |
| Maximum Measurement Diameter R50-4PP | 100mm |
| Maximum Measurement Diameter R50-EC | 100mm |
| Maximum Measurement Diameter R50-200-4PP | 200mm |
| Maximum Measurement Diameter R50-200-EC | 200mm |
| Maximum Measurement Diameter R54-200-4PP | 200mm |
| Maximum Measurement Diameter R540-200-EC | 200mm |
| Maximum Measurement Diameter R54-300-4PP | 300mm |
| Maximum Measurement Diameter R54-300-EC | 300mm |
| XY Stage Travel Range R50-4PP | 100mm×100mm |
| XY Stage Travel Range R50-EC | 100mm×100mm |
| XY Stage Travel Range R50-200-4PP | 200mm×200mm |
| XY Stage Travel Range R50-200-EC | 200mm×200mm |
| XY Stage Travel Range R54-200-4PP | 200mm×200mm |
| XY Stage Travel Range R540-200-EC | 200mm×200mm |
| XY Stage Travel Range R54-300-4PP | 300mm×300mm |
| XY Stage Travel Range R54-300-EC | 300mm×300mm |
| Maximum Sample Height R50-4PP | 100mm |
| Maximum Sample Height R50-EC | 100mm |
| Maximum Sample Height R50-200-4PP | 15mm |
| Maximum Sample Height R50-200-EC | 15mm |
| Maximum Sample Height R54-200-4PP | 15mm |
| Maximum Sample Height R540-200-EC | 15mm |
| Maximum Sample Height R54-300-4PP | 15mm |
| Maximum Sample Height R54-300-EC | 15mm |
| Z Range | 60mm |
| Z Stage Type | Automated |
| XY Stage Type | Automated |
| Sample Stage Max Weight | 2.5kg |
| Tip-Tilt Stage | ±5°, Manual |
| Site Repeatability | <0.02% |
| Accuracy R50-4PP | ±0.2% |
| Accuracy R50-EC | ±1% |
| Matching | <1% |
| System Size (W×D×H) R50-4PP/EC | 305mm×305mm×550mm |
| System Size (W×D×H) R50-200-4PP/EC | 406mm×406mm×550mm |
| System Weight R50-4PP/EC | 15kg |
| System Weight R50-200-4PP/EC | 22kg |
| 4PP P/N | 610-0599, 610-0593, 610-0598, 610-0594 |
| Nominal Spring Load (g) | 100, 100, 100, 200 |
| Nominal Spacing (mm) | 1.016, 0.635, 0.635, 1.575 |
| Tip Radius (mm) | 0.5, 0.04, 0.04, 0.04 |
| Needles Retraction (mm) | 0.25, 0.25, 0.25, 0.25 |
| Type | A |
| Type | F |
| Type | G |
| Type | E |
| Application | Metals |
| Application | General purpose for implantation |
| Application | doped poly |
| Application | silicide and epitaxy |
| Application | Specifically designed for high impedance surfaces such as implant doping |
| Application | Substrate measurements |
| EC P/N | 610-0599, 610-0605 |
| Frequency (MHz) | 10, 5 |
| Nominal Coil Diameter (mm) | 1.5, 1.5 |
| Type | EC A |
| Type | EC B |
| Application | Typical metal films up to 1Ω, Higher resistance and thin metal films up to 50Ω |
Applications
1. Semiconductor 2. Advanced packaging 3. Solar panels 4. Flat panel and VR displays 5. Printed circuits 6. Wearable devices 7. Conductive materials
Key Features
1. High precision measurement of sheet resistance and thickness 2. Flexible measurement options with contact and non-contact probes 3. Advanced software interface for easy operation 4. High-resolution X-Y working range up to 200mm 5. Suitable for various conductive materials and thin films
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>
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