R50 Series Thin Film Sheet Resistance Mapping System

R50 Series Thin Film Sheet Resistance Mapping System

Supplier
Ybsemi-Solution
Part Number
R50 Series Thin Film Sheet Resistance Mapping System
Category
Other
Origin
China

The Filmetrics R50 Series is an advanced thin film sheet resistance mapping system designed to measure sheet resistance and thickness of conductive thin films with high precision and flexibility.

Specification Snapshot
Maximum Measurement Diameter R50-4PP
100mm
Maximum Measurement Diameter R50-EC
100mm
Maximum Measurement Diameter R50-200-4PP
200mm
Maximum Measurement Diameter R50-200-EC
200mm
Maximum Measurement Diameter R54-200-4PP
200mm
Maximum Measurement Diameter R540-200-EC
200mm
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Overview

The Filmetrics R50 Series is an advanced thin film sheet resistance mapping system designed to measure sheet resistance and thickness of conductive thin films with high precision and flexibility.

Specifications

ParameterValue
Measurement Range R50-4PP1mΩ/sq-200MΩ/sq
Measurement Range R50-EC1mΩ/sq-50Ω/sq
Maximum Measurement Diameter R50-4PP100mm
Maximum Measurement Diameter R50-EC100mm
Maximum Measurement Diameter R50-200-4PP200mm
Maximum Measurement Diameter R50-200-EC200mm
Maximum Measurement Diameter R54-200-4PP200mm
Maximum Measurement Diameter R540-200-EC200mm
Maximum Measurement Diameter R54-300-4PP300mm
Maximum Measurement Diameter R54-300-EC300mm
XY Stage Travel Range R50-4PP100mm×100mm
XY Stage Travel Range R50-EC100mm×100mm
XY Stage Travel Range R50-200-4PP200mm×200mm
XY Stage Travel Range R50-200-EC200mm×200mm
XY Stage Travel Range R54-200-4PP200mm×200mm
XY Stage Travel Range R540-200-EC200mm×200mm
XY Stage Travel Range R54-300-4PP300mm×300mm
XY Stage Travel Range R54-300-EC300mm×300mm
Maximum Sample Height R50-4PP100mm
Maximum Sample Height R50-EC100mm
Maximum Sample Height R50-200-4PP15mm
Maximum Sample Height R50-200-EC15mm
Maximum Sample Height R54-200-4PP15mm
Maximum Sample Height R540-200-EC15mm
Maximum Sample Height R54-300-4PP15mm
Maximum Sample Height R54-300-EC15mm
Z Range60mm
Z Stage TypeAutomated
XY Stage TypeAutomated
Sample Stage Max Weight2.5kg
Tip-Tilt Stage±5°, Manual
Site Repeatability<0.02%
Accuracy R50-4PP±0.2%
Accuracy R50-EC±1%
Matching<1%
System Size (W×D×H) R50-4PP/EC305mm×305mm×550mm
System Size (W×D×H) R50-200-4PP/EC406mm×406mm×550mm
System Weight R50-4PP/EC15kg
System Weight R50-200-4PP/EC22kg
4PP P/N610-0599, 610-0593, 610-0598, 610-0594
Nominal Spring Load (g)100, 100, 100, 200
Nominal Spacing (mm)1.016, 0.635, 0.635, 1.575
Tip Radius (mm)0.5, 0.04, 0.04, 0.04
Needles Retraction (mm)0.25, 0.25, 0.25, 0.25
TypeA
TypeF
TypeG
TypeE
ApplicationMetals
ApplicationGeneral purpose for implantation
Applicationdoped poly
Applicationsilicide and epitaxy
ApplicationSpecifically designed for high impedance surfaces such as implant doping
ApplicationSubstrate measurements
EC P/N610-0599, 610-0605
Frequency (MHz)10, 5
Nominal Coil Diameter (mm)1.5, 1.5
TypeEC A
TypeEC B
ApplicationTypical metal films up to 1Ω, Higher resistance and thin metal films up to 50Ω

Applications

1. Semiconductor 2. Advanced packaging 3. Solar panels 4. Flat panel and VR displays 5. Printed circuits 6. Wearable devices 7. Conductive materials

Key Features

1. High precision measurement of sheet resistance and thickness 2. Flexible measurement options with contact and non-contact probes 3. Advanced software interface for easy operation 4. High-resolution X-Y working range up to 200mm 5. Suitable for various conductive materials and thin films

Datasheet

Product Datasheet
PDF
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Supplier Information

Yb
Ybsemi-Solution
View Supplier →
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> &nbsp; &nbsp; &nbsp; At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> &nbsp; &nbsp; &nbsp; The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>

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