EVSA20
EVSA20 is a precision motion platform designed for high-accuracy positioning and stability, suitable for various industrial and scientific applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Drive Type | Voice coil motor |
| Straightness/Flatness (μm) | ±0.1μm |
| Pitch/Yaw (arc sec) | 8arc sec |
| Maximum Speed (mm/s) | 20mm/s |
| Maximum Acceleration (g) | 0.5g |
| Feedback Resolution (μm) | 0.02μm |
| Maximum Load (kg) | 10kg |
| Working Air Pressure (MPa) | 0.4MPa |
| Piping Air Pressure (MPa) | 0.05MPa |
| Minimum Step Distance (μm) | Closed-loop |
| Weight (kg) | 6.5kg |
Applications
Key Features
Datasheet
Supplier Information
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