PPS-110LM
PPS-110LM is a high-precision linear motor stage designed for applications requiring accurate positioning and smooth motion control.
Specification Snapshot
Travel(mm) 100
100mm
Travel(mm) 200
200mm
Travel(mm) 300
300mm
Travel(mm) 500
500mm
Travel(mm) 1000
1000mm
Resolution, Typical(nm)
10nm
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Overview
PPS-110LM is a high-precision linear motor stage designed for applications requiring accurate positioning and smooth motion control.
Specifications
| Parameter | Value |
|---|---|
| Travel(mm) 100 | 100mm |
| Travel(mm) 200 | 200mm |
| Travel(mm) 300 | 300mm |
| Travel(mm) 500 | 500mm |
| Travel(mm) 1000 | 1000mm |
| Straightness/Flatness(μm) 100 | ±3μm |
| Straightness/Flatness(μm) 200 | ±4μm |
| Straightness/Flatness(μm) 300 | ±5μm |
| Straightness/Flatness(μm) 500 | ±10μm |
| Straightness/Flatness(μm) 1000 | ±15μm |
| Pitch(μrad) 100 | ±75 |
| Pitch(μrad) 200 | ±100 |
| Pitch(μrad) 300 | ±125 |
| Pitch(μrad) 500 | ±200 |
| Pitch(μrad) 1000 | ±300 |
| Yaw(μrad) 100 | ±75 |
| Yaw(μrad) 200 | ±85 |
| Yaw(μrad) 300 | ±100 |
| Yaw(μrad) 500 | ±200 |
| Yaw(μrad) 1000 | ±300 |
| Weight(g) 100 | 2700g |
| Weight(g) 200 | 3500g |
| Weight(g) 300 | 4300g |
| Weight(g) 500 | 6200g |
| Weight(g) 1000 | 11000g |
| Encoder | Digital (RS-422) |
| Resolution, Typical(nm) | 10nm |
| Unidirectional Repeatability(nm) | 100nm |
| Max Load Fx(N) | 150 peak, 50 continuousN |
| Max Load Fy(N) | 150N |
| Max Load Fz(N) | 250N |
| Max Load Mx(N·m) | 60N·m |
| Max Load My(N·m) | 35N·m |
| Max Load Mz(N·m) | 50N·m |
| Stiffness kxx(μrad/N·m) | 50 |
| Stiffness kxy(μrad/N·m) | 50 |
Applications
1. Precision manufacturing 2. Semiconductor processing 3. Optical inspection 4. Scientific research
Key Features
1. High precision linear motor drive 2. Multiple travel options 3. Robust aluminum and steel construction 4. Digital encoder for accurate positioning
Datasheet
Product Datasheet
PDF
Supplier Information
SYMC (Tianjin) Instrument Equipment Co., Ltd. is a professional manufacturer focusing on ultra-precision motion control technology and products. We are committed to providing innovative products and solutions for ultra-precision motion control technology for the manufacturing of high-end equipment and the research and development of scientific research instruments. Adhering to the purpose of "high-end innovation, lean manufacturing" and the goal of "building an international brand of China's high-end manufacturing", we provide key technologies and build a solid foundation for the upgrading of China's high-end manufacturing equipment industry, and realize the localization of core technology equipment.
SYMC (Tianjin) Instrument Equipment Co., Ltd. has reached the international advanced level in nano motion control technology and owns complete independent intellectual property rights. The company's core technology integrates precision sensing, precision driving, precision machinery, precision control, precision measurement and precision integration, and the comprehensive indicators of products have reached the international advanced level. The company provides a series of products and complete solutions including high-precision nano positioning platforms, high-speed tip-tilt mirrors, piezoelectric actuators, nano capacitive displacement sensors, high-precision air bearing platforms, piezoelectric driven positioning platforms, micro positioning platforms, microscope stages and precision motion control integration.
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