NNS-Z400-02
The NNS-Z400-02 is a high-precision capacitive sensor designed for Z-axis motion control, offering exceptional resolution and vibration frequency performance.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motion Axis | Z |
| Sensor Type | Capacitive |
| Closed-loop Travel (μm) | 400 |
| Closed-loop Resolution (nm) | 2 |
| No-load Resonance Frequency (Hz) | 400 |
| Resonance Frequency with Load (0.3kg) (Hz) | 200 |
| Linearity (%) | 0.02 |
| Pitch (μrad) | ±10 |
| Yaw (μrad) | ±45 |
| Port | D-sub15 |
| Material | Aluminum alloy |
| Weight (kg) | 0.4 |
| Dimensions (mm) | 58x73x90 |
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