High-Resolution Optical Path Testing
X-ray diffraction (XRD) is a nondestructive technique for characterizing crystalline materials. Powder diffraction images reveal crystal structure, phases and preferred orientation; calculations yield component content, average grain size, crystallinity, stress/strain and crystal defects. Adjusting the optics enables XRR measurements of thin-film thickness, roughness and density, plus semiconductor rocking curves and high-resolution reciprocal-space maps (RSM). The Hybrid high-resolution optics module supports rocking curves, Phi scans, XRR and 2D RSM. Single-crystal tests require the measured crystal-plane identity and its d-spacing or 2Theta. Phi scans require the sample-normal d-spacing/angle and angle between normal and measured plane. RSM requires normal d-spacing/2theta, measured-plane d-spacing/2theta and the angle between measured and normal planes.
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