Thin-Film Reflectivity Testing (XRR)
X-ray diffraction (XRD) is a nondestructive technique for characterizing crystalline materials. Powder diffraction images reveal crystal structure, phases and preferred orientation; calculations yield component content, average grain size, crystallinity, stress/strain and crystal defects. Adjusting the optics enables XRR measurements of thin-film thickness, surface roughness and density, plus semiconductor-film rocking curves and high-resolution reciprocal-space maps (RSM) with high-resolution optics. Differences in electron density and other properties between film/substrate materials cause total X-ray reflection at film interfaces. Reflectivity (XRR) yields total-reflection interference fringes; fitting, Fourier transforms or other calculations determine film thickness, roughness and density. The company offers thin-film XRR testing and reflectivity fringe spectra.
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