Thin-Film Phase Analysis (Grazing-Incidence Scan, GI-XRD)
X-ray diffraction (XRD) is a nondestructive technique for characterizing crystalline materials. Powder diffraction images reveal crystal structure, phases and preferred orientation; calculations yield component content, average grain size, crystallinity, stress/strain and crystal defects. Adjusting the optical system enables XRR measurements of thin-film thickness, surface roughness and density, plus semiconductor-film rocking curves and high-resolution reciprocal-space maps (RSM) with a high-resolution optical path. A Parallel Mirror module with a flat-plate collimator establishes standard parallel-beam geometry. Grazing-incidence thin-film scans avoid strong substrate interference, isolating the film's phase information.
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