0°-193nm Laser High-Reflection Coating

0°-193nm Laser High-Reflection Coating

Supplier
Hongce-opt
Category
Technical Services
Origin
China

宏策光电0°-193nm DUV Lithography/Excimer HR,Very High R/Low Absorption,Special UV Dielectrics,Dense/High-Energy/Laser Resistant for Long Pulsed High-Power Stable Normal Reflection.

Specification Snapshot
Substrate
Quartz, Calcium Fluoride CaF2 and Other Materials
Dimensions
Customer Customization
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Overview

宏策光电0°-193nm DUV Lithography/Excimer HR,Very High R/Low Absorption,Special UV Dielectrics,Dense/High-Energy/Laser Resistant for Long Pulsed High-Power Stable Normal Reflection.

Specifications

ParameterValue
SubstrateQuartz, Calcium Fluoride CaF2 and Other Materials
DimensionsCustomer Customization
Spectrum R [0° incidence; 193nm]0° Incidence, R>98%@193nm
Threshold [193nm]>1J/cm2@193nm

Applications

Mirrors for193nm Excimer Lithography,Deep-UV Cavities/Wafer Inspection,Efficient Normal0° Deep-UV Reflection

Datasheet

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Supplier Information

Ho
Hongce-opt
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Suzhou Hongce Optoelectronics Technology Co., Ltd., founded in August 2015, specializes in the R&D and production of precision optical nano-film devices and PVD coating equipment, covering wavelength ranges from infrared to X-ray and neutron optics, providing one-stop solutions. The company has mastered core technologies in short-wavelength optics such as EUV and X-ray, achieving domestic substitution. With multiple coating and testing equipment, it holds over 40 intellectual properties. Products include DUV/EUV lithography thin-film devices, laser films, multilayer Laue lenses (MLL), X-ray detection crystals, serving major national scientific platforms like lithography, synchrotron radiation, and elemental analysis.

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0°-193nm Laser High-Reflection Coating
Hongce-opt · Technical Services
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