Dual-Frequency Laser Interferometer Signal Processing Board
This dual-frequency laser interferometer uses heterodyne interferometry and conventional free-space optical transmission for resolution down to 0.077nm. Excellent measurement and real-time closed-loop feedback serve subnanometer/nanometer metrology in semiconductor equipment and length measurement. A signal-processing card demodulates phase and outputs displacement through a high-speed port. The motion-measurement/control processor offers high resolution/speed, low noise/latency, real-time feedback and multi-axis measurement. Four- and eight-channel temperature-acquisition modules combine precision acquisition cards with temperature, pressure and humidity probes for multipoint environmental data and real-time wavelength compensation. 锐云威科技 offers a VME system integrating interferometer modules, acquisition software and a development environment. The note identifies the signal-processing card and temperature/pressure/humidity module as distributed products from 拍频光电.
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