PM63.01-Series Two-Dimensional Specimen Stage
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Specifications
| Parameter | Value |
|---|---|
| X-Direction Closed-Loop Travel [max.] | 40 mm |
| Y-Direction Maximum Travel [max.] | 40 mm |
| Closed-Loop Sensor | Integrated Grating Scale |
| X-Direction Resolution | 20 mm/s |
| Y-Direction Resolution | 20 mm/s |
| X-Direction Positioning Accuracy | 100 nm |
| Y-Direction Positioning Accuracy | 100 nm |
| X-Direction Repeat Positioning Accuracy | 40 nm |
| Y-Direction Repeat Positioning Accuracy | 40 nm |
| X-Direction Pitch Angle [Tolerance ±10%] | 25 arc sec |
| X-Direction Yaw Angle [Tolerance ±10% (Originally Merged Vertically with Pitch Angle)] | 25 arc sec |
| Y-Direction Pitch Angle [Tolerance ±10%] | 25 arc sec |
| Y-Direction Yaw Angle [Tolerance ±10% (Originally Merged Vertically with Pitch Angle)] | 25 arc sec |
| Load [Tolerance ±15%] | 50 kg |
| Drive Voltage | ±250 V |
| Mass [Tolerance ±5%] | 1600 g |
| Cable Length [Tolerance ±5%] | 1.5 m |
| Interface | High-Density D-sub 15, LEMO |
| Material | Stainless Steel, Aluminum Alloy, Titanium Alloy |
| Operating Temperature | -20~80 °C |
Key Features
Datasheet
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