PM81.1-Series Piezoelectric Fast Steering Mirror PM81.15

PM81.1-Series Piezoelectric Fast Steering Mirror PM81.15

Supplier
Raiven
Part Number
PM81.15
Category
Motorized Stages
Origin
China
Specification Snapshot
Resolution
0.1 μrad
θx Capacitance [Tolerance ±15%]
3 μF
θy Capacitance [Tolerance ±15%]
3 μF
Resonant Frequency θx [Tolerance ±15%]
2.7 kHz
Resonant Frequency θy [Tolerance ±15%]
2.7 kHz
Mass [Tolerance ±5%]
400 g
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Specifications

ParameterValue
Nominal Travel θx [min.]7.5 mrad
Nominal Travel θy [min.]7.5 mrad
Maximum Travel θx [Tolerance ±10%]8.5 mrad
Maximum Travel θy [Tolerance ±10%]8.5 mrad
Closed-Loop SensorSGS
Resolution0.1 μrad
Linearity0.15%
Repeatability1 μrad
θx Capacitance [Tolerance ±15%]3 μF
θy Capacitance [Tolerance ±15%]3 μF
Resonant Frequency θx [Tolerance ±15%]2.7 kHz
Resonant Frequency θy [Tolerance ±15%]2.7 kHz
Mass [Tolerance ±5%]400 g
Cable Length [Tolerance ±5%]1.5 m
InterfaceD-sub 15/LEMO
MaterialStainless Steel, Invar, Titanium Alloy
Operating Temperature-20~80 °C

Key Features

Two-Dimensional Deflection,Customizable10mrad Deflection Angle;Fast Response,Excellent Position Stability;Integrated Closed Loop,0.1% Linearity;Industrial/Space Grade,Closed-Loop Motion Life Over10 Billion Cycles;High/Low Temperature,Acceleration Shock and Thermal-Vacuum Tests

Datasheet

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Supplier Information

Ra
Raiven
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Raiven Technology, founded in 2023 and located in Shanghai Zhangjiang Science City, focuses on advanced measurement and control technology. Targeting fields such as pan-semiconductor and commercial aerospace, it provides micro/nano measurement and control solutions, including high-end drive control, advanced ceramics, and precision actuators. With a 2,500-square-meter industrialization base, its products have been applied in semiconductor lithography, inspection, and other equipment. The core team comes from semiconductor equipment, aerospace, and other industries with rich experience. The company is committed to providing one-stop solutions and services to drive the industrial and technological revolution.

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PM81.1-Series Piezoelectric Fast Steering Mirror PM81.15
Raiven · Motorized Stages
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