PM81.1-Series Piezoelectric Fast Steering Mirror PM81.11
Specification Snapshot
Resolution
0.02 μrad
θx Capacitance [Tolerance ±15%]
1 μF
θy Capacitance [Tolerance ±15%]
1 μF
Resonant Frequency θx [Tolerance ±15%]
3.5 kHz
Resonant Frequency θy [Tolerance ±15%]
3.5 kHz
Mass [Tolerance ±5%]
250 g
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Specifications
| Parameter | Value |
|---|---|
| Nominal Travel θx [min.] | 2.5 mrad |
| Nominal Travel θy [min.] | 2.5 mrad |
| Maximum Travel θx [Tolerance ±10%] | 3 mrad |
| Maximum Travel θy [Tolerance ±10%] | 3 mrad |
| Closed-Loop Sensor | SGS |
| Resolution | 0.02 μrad |
| Linearity | 0.1% |
| Repeatability | 0.3 μrad |
| θx Capacitance [Tolerance ±15%] | 1 μF |
| θy Capacitance [Tolerance ±15%] | 1 μF |
| Resonant Frequency θx [Tolerance ±15%] | 3.5 kHz |
| Resonant Frequency θy [Tolerance ±15%] | 3.5 kHz |
| Mass [Tolerance ±5%] | 250 g |
| Cable Length [Tolerance ±5%] | 1.5 m |
| Interface | D-sub 15/LEMO |
| Material | Stainless Steel, Invar, Titanium Alloy |
| Operating Temperature | -20~80 °C |
Key Features
Two-Dimensional Deflection,Customizable10mrad Deflection Angle;Fast Response,Excellent Position Stability;Integrated Closed Loop,0.1% Linearity;Industrial/Space Grade,Closed-Loop Motion Life Over10 Billion Cycles;High/Low Temperature,Acceleration Shock and Thermal-Vacuum Tests
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Supplier Information
Raiven Technology, founded in 2023 and located in Shanghai Zhangjiang Science City, focuses on advanced measurement and control technology. Targeting fields such as pan-semiconductor and commercial aerospace, it provides micro/nano measurement and control solutions, including high-end drive control, advanced ceramics, and precision actuators. With a 2,500-square-meter industrialization base, its products have been applied in semiconductor lithography, inspection, and other equipment. The core team comes from semiconductor equipment, aerospace, and other industries with rich experience. The company is committed to providing one-stop solutions and services to drive the industrial and technological revolution.
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