Two-Dimensional Tip/Tilt Stage / Fast Steering Mirror
Specification Snapshot
Open-Loop Resolution [θx]
0.02 μrad
Open-Loop Resolution [θy]
0.02 μrad
Closed-Loop Resolution [θx]
0.05 μrad
Closed-Loop Resolution [θy]
0.05 μrad
No-Load Resonant Frequency [θx]
11.5 kHz
No-Load Resonant Frequency [θy]
11.5 kHz
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Specifications
| Parameter | Value |
|---|---|
| Open-Loop Travel [θx] | 3 mrad |
| Open-Loop Travel [θy] | 3 mrad |
| Closed-Loop Travel [θx] | 2.7 mrad |
| Closed-Loop Travel [θy] | 2.7 mrad |
| Open-Loop Resolution [θx] | 0.02 μrad |
| Open-Loop Resolution [θy] | 0.02 μrad |
| Closed-Loop Resolution [θx] | 0.05 μrad |
| Closed-Loop Resolution [θy] | 0.05 μrad |
| No-Load Resonant Frequency [θx] | 11.5 kHz |
| No-Load Resonant Frequency [θy] | 11.5 kHz |
Key Features
Two-Axis Angular Adjustment; Fast Response; Closed-Loop Sensor Integration Available
Datasheet
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Supplier Information
Raiven Technology, founded in 2023 and located in Shanghai Zhangjiang Science City, focuses on advanced measurement and control technology. Targeting fields such as pan-semiconductor and commercial aerospace, it provides micro/nano measurement and control solutions, including high-end drive control, advanced ceramics, and precision actuators. With a 2,500-square-meter industrialization base, its products have been applied in semiconductor lithography, inspection, and other equipment. The core team comes from semiconductor equipment, aerospace, and other industries with rich experience. The company is committed to providing one-stop solutions and services to drive the industrial and technological revolution.
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