PM53.2-Series XY Two-Dimensional Flexure Stage PM53.29
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Specifications
| Parameter | Value |
|---|---|
| Nominal Travel [Tolerance ±15%] | 1500 μm |
| Maximum Travel [Tolerance ±15%] | 1800 μm |
| Closed-Loop Sensing | SGS / Capacitance |
| Resolution | 0.5 nm |
| Linearity | 0.08% |
| Repeatability | ±15 nm |
| Thrust / Pulling Force [Tolerance ±15%] | 10/8 |
| Maximum Load [Tolerance ±15%] | 15 N |
| Capacitance [Tolerance ±15%] | 55 μF |
| No-Load Resonant Frequency [Tolerance ±15%] | 50 Hz |
| Resonant Frequency [50g Load; Tolerance ±15%] | 45 Hz |
| Mass [Tolerance ±5%] | 1300 g |
| Material | Stainless Steel, Aluminum Alloy |
| Operating Temperature | -20~80 °C |
| Cable Length [Tolerance ±5%] | 1.5 m |
| Interface | D-sub 15/LEMO |
Key Features
Datasheet
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