AMT-Series Industrial High-Power Full-Range Picosecond Lasers
AMT deep-UV picosecond lasers feature a leading fourth-harmonic crystal-position switching function that preserves beam quality, spot size and pointing after switching. New optics provide power stability <3%, M²<1.3, spot circularity >90%, 266nm output and power above 3W for high-quality micromachining. AMT-266's self-developed reliable core modules, including an ultrafast seed and high-temperature nonlinear-crystal oven, give single-position life >1000hrs and system life >20000hrs. An air-cleaning system maintains the cavity and extends crystal life. Multiple trigger modes, the stated synchronized output-power capability and built-in power checking combine performance/stability. Uses include sapphire/GaN separation, noncarbonizing cold processing and glass-die separation. AMT-266-3W-70M primarily inspects chip defects at 28nm and below, with other uses in large-aperture optic topography, polymer cutting and high-density storage.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Wavelength | 266 nm |
| Average Power | >3W |
| Beam Quality M² | <1.3 |
| Spot Circularity | >90 % |
| Beam Diameter | ~2±20% |
| Divergence Angle | <1 mRad |
| Pointing Stability | <20 μrad/°C |
| Polarization Ratio | 100:1 Linear,Horizontal |
| Pulse-to-Pulse Stability [RMS] | <3 % |
| Average Power Stability [over 12 hours] | <5 % |
| Cold-Start Warm-Up | <40 mins. |
| Standby Warm-Up | <10 mins. |
| Ambient Temperature | 5-40°C |
| Ambient Humidity [Non-condensing] | 20 to 80, Non-condensing |
| Storage Temperature | -20 to 50 °C |
| Storage Humidity [Non-condensing] | 20 to 80,Non-condensing |
| Power Requirements (VDC/Watts) | 24/1000 |
| Communication Protocol | RS232 |
| Cooling Method | Water |
| Weight | 55 千克 |
| Pulse Energy [AMT 266; Configuration: 3W-200K; @200KHz] | >15@200KHz |
| Specified Frequency [AMT 266; Configuration: 3W-200K] | 200KHz |
| Repetition Rate [AMT 266; Configuration: 3W-200K] | 100-200 kHz |
| Pulse Width [AMT 266; Configuration: 3W-200K] | <12 ps |
| Pulse Energy [AMT 266; Configuration: 3W-70M; @70MHz] | >0.043@70MHz |
| Specified Frequency (kHz) [AMT 266; Configuration: 3W-70M] | 70MHz |
| Repetition Rate (kHz) [AMT 266; Configuration: 3W-70M] | 70MHz |
| Pulse Width [AMT 266; Configuration: 3W-70M] | <50 ps |
Applications
Key Features
Datasheet
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