Ultrahigh-Precision Rotary Stage UARS-A
Ultraprecise Nested Dual Air-Bearing Rotary Table,Sync/Independent Inner-Outer Axes for Internal Self-/External Auto Cross-Calibration,Precise Angle/Stable Rate,Three Precision Gratings/Multiple Heads/Reliable Linear Drive.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Load Capacity [Inner Axis] | 10kg |
| Angular Displacement Error (PV) [Inner Axis; PV] | 0.2″ |
| Angular Displacement Repeat Positioning Accuracy [Inner Axis] | 0.1″ |
| Homing Error [Inner Axis] | 0.05″ |
| Rate Range [Inner Axis] | 0-100r/min |
| Radial Rotation Error [Inner Axis] | 100nm |
| Rotary-Stage Tabletop [Inner Axis] | φ155mm |
| Load Capacity [Outer Axis] | 50kg |
| Angular Displacement Error (PV) [Outer Axis; PV] | 0.1″ |
| Angular Displacement Repeat Positioning Accuracy [Outer Axis] | 0.05″ |
| Homing Error [Outer Axis] | 0.03″ |
| Rate Range [Outer Axis] | 0-2r/min |
| Radial Rotation Error [Outer Axis] | 500nm |
| Rotary-Stage Tabletop [Outer Axis] | φ320mm |
| Rate Stability [Within a 1° range] | Better than 0.1% |
| Rate Stability [Within a 10° range] | Better than 0.01% |
| Rate Stability [Within a 100° range] | Better than 0.001% |
| Rate Stability [Within a 360° range] | Better than 0.0001% |
| Mounting Tabletop Dimensions | 476mm x 476mm |
| Mounting Method | Flange Mounting or Direct Placement |
| Optional Configuration | Environmental Adaptability Design |
Datasheet
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Supplier Information
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