High-Precision Linear Motor Translation Stage DOLL-100HK

JCOPTIX high-precision direct-drive linear-motor stages have Jiangsu metrology-institute testing/certification reports. A traveling magnetic field applies electromagnetic thrust directly without complex transmission components or friction, enabling high speed/acceleration. Eliminating screw backlash and long-term wear maintains accuracy. Linear motors suit demanding positioning, running smoothly even at the lowest speeds and without vibration at high speed, avoiding nonlinear control behavior and allowing easy control at every position. Highly linear force can be freely set/strictly controlled. High-value DOLL stages combine direct drive, crossed rollers, and precision optical feedback for excellent dynamics/accuracy. They operate independently or combine through existing holes into complex multiaxis systems. DOLL travels 50~200 mm, load 100 N, maximum speed 500 mm/s, unloaded acceleration 15 m/s². Responsive drive/fine-pitch scales provide 100 nm minimum increments. Precision microassembly, AOI, microscopy, and micro/nanoprocessing in semiconductor, LCD, microelectronics, and biomedical fields benefit from efficient stable intelligent operation. Higher-accuracy/flexible complete systems are customizable. Precision linear-motor stages, travel 50~200 mm. Models: DOLL-50H, DOLL-100H, DOLL-150H, DOLL-200H. Effective travels 50, 100, 150, 200 mm; blackened aluminum alloy; direct drive without backlash; full-closed-loop scale feedback, nanometer precision, minimum 100 nm. JCOPTIX DOLL direct-drive stages offer 50, 100, 150, 200 mm travel with crossed rollers and precision optical feedback. High dynamics/accuracy support single axes or multiaxis combinations through mounting holes. Load 100 N, maximum 500 mm/s, unloaded acceleration 15 m/s², responsive drive/fine scales provide 100 nm increments. DOLL requires DCL-01 precision servo controllers. Precision linear-motor kits, travel 50-200 mm. Models: DOLL-50HK, DOLL-100HK, DOLL-150HK, DOLL-200HK. Effective travels 50, 100, 150, 200 mm; blackened aluminum alloy; full-closed-loop scales, nanometer precision, minimum 100 nm; controller/power included. JCOPTIX DOLL direct-drive stages offer 50, 100, 150, 200 mm travel, crossed rollers, and precision optical feedback for high dynamics/accuracy. Single-axis use or multiaxis systems through mounting holes are supported. Load is 100 N, maximum speed 500 mm/s, unloaded acceleration 15 m/s², and responsive drive/fine scales provide 100 nm steps. Included DCL-01 servo controllers and power supplies allow immediate use. Core-parameter test methods: equipment indicators and DOLL examples retained separately. Stage core parameters. In precision manufacturing, semiconductors, optoelectronic inspection, and research, motion accuracy, stability, and reliability determine quality/efficiency. Test methods/standards define device quality; pitch, yaw, positioning accuracy, and repeatability quantify motion errors. Jiangsu metrology results: JCOPTIX commissioned the Jiangsu Institute of Metrology to test/report stage parameters under 1251-2010, Calibration Specification for Coordinate Positioning Measurement Systems. API XD Laser 6D interferometry measures positioning, pitch/yaw, and other parameters in one setup at 0.5ppm accuracy. Figure 1. Jiangsu institute's stage test report. JCOPTIX test methods: GB/T 11336-2004 procedures use Renishaw XL-80 interferometers and Nuoxu NORMAT1210 precision photoelectric autocollimators. Nuoxu NORMAT1210 measures pitch/yaw over ±1000 arcsec with ±1 arcsec accuracy and 0.2 arcsec repeatability, capturing tiny angular deviations/wobble across a 3800 arcsec × 2800 arcsec field. Segmented measurements and accumulated calculations determine actual-versus-ideal trajectory deviations. Optical accumulation improves accuracy; software directly outputs angles, usually arcseconds or microradians, with lower overall error. 1. Pitch/yaw. (1). Pitch: tabletop rotation θX about the horizontal X axis perpendicular to travel. (2). Yaw: θZ about the vertical Z axis. Figure 2. Pitch/yaw test schematic. 2. Repeatability/positioning accuracy. (1). Positioning accuracy is maximum error from the reference origin to target points over full travel, a key performance indicator. (2). Repeatability usually refers to repeated bidirectional positioning, such as ±X, and actual-versus-set position error over repeated arrivals at one command position, reflecting stability/consistency. Under GB/T 17421.2-2023, JCOPTIX uses Germany's Renishaw XL-80 with multiple target points and repeated forward/reverse arrivals. Actual positions and maximum deviations at each target calculate both repeatability and positioning accuracy. Accuracy is ±0.5 ppm, resolution 1 nm, and stable operation 0-40℃. Environmental compensation corrects temperature, pressure, and humidity, while up to 50 kHz dynamic acquisition captures small motion errors. Figure 3. Interferometric positioning test of precision direct-drive stages. 3. Speed stability. Actual speed fluctuation at a set speed reflects smoothness of control. Renishaw XL-80 dynamic acquisition at 50 kHz records displacement/time during commanded constant-speed travel; software derives speed/fluctuation. For example, JCOPTIX DOLL products over 50~200 mm travel reach 500 mm/s maximum and unloaded acceleration 15 m/s². 4. Homing accuracy. Deviation between the returned and original zero after motion reflects origin stability. Renishaw XL-80 records the initial zero and actual zero after repeated full-travel cycles; maximum deviation is homing accuracy. 5. Minimum achievable and repeatable increments. (1). Minimum achievable increment characterizes the smallest motion step. Renishaw XL-80 measures each actual increment during repeated commanded minimum steps to confirm the achievable minimum. (2). Minimum repeatable increment is the smallest physical step with stable repeatable response, statistically verified and normally no smaller than design resolution. Under GB/T 17421.2-2023, select a random 40 μm segment within full travel, step at the proposed minimum, for example 4 μm, use a 5 μm jump, and repeat 5 cycles. Measured repeatability must be below 20% of the increment, for example 4 μm × 20% = 0.8 μm. Every JCOPTIX motorized stage is tested to relevant standards before delivery and includes a shipment test report.

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