METIRIO Optical Encoder Scale

METIRIO Optical Encoder Scale

Supplier
Nano-stage
Category
Encoders
Origin
China

METIRIO® is an advanced high-precision encoder designed and manufactured for the most stringent closed-loop nanopositioning requirements. Development draws on long experience in product and market analysis and addresses many design rules to meet current technical challenges. It combines maximum miniaturization, high resolution, and speed. The modular readhead is available as an OEM product or in a custom metal housing to ease integration and operation. Metirio sets a new benchmark in low power consumption and the source-described ultrahigh voltage. The GUI includes intelligent functions for simplified parameter setup, and all parameters can be stored for retrieval. An integrated light source illuminates a scale with a 20 µm-pitch incremental grating and a track containing reference marks for absolute positioning. Reflected light forms an interference pattern detected by a diode array in the readhead. Relative scale-to-head movement produces analog sine and cosine signals and TTL reference marks.

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Overview

METIRIO® is an advanced high-precision encoder designed and manufactured for the most stringent closed-loop nanopositioning requirements. Development draws on long experience in product and market analysis and addresses many design rules to meet current technical challenges. It combines maximum miniaturization, high resolution, and speed. The modular readhead is available as an OEM product or in a custom metal housing to ease integration and operation. Metirio sets a new benchmark in low power consumption and the source-described ultrahigh voltage. The GUI includes intelligent functions for simplified parameter setup, and all parameters can be stored for retrieval. An integrated light source illuminates a scale with a 20 µm-pitch incremental grating and a track containing reference marks for absolute positioning. Reflected light forms an interference pattern detected by a diode array in the readhead. Relative scale-to-head movement produces analog sine and cosine signals and TTL reference marks.

Key Features

Dimensions 6.6 x 5.1 x 1.7mm. Resolution 0.4nm@1m/s; speed up to 10m/s; UHV down to source-stated 10 -11mbar; temperature 0°C–80°C. Suits mechanically vibrating harsh environments and reflective scales with 20µm pitch. The METIRIO readhead embeds optics/electronics in a tiny flip-chip package. METIRIO A1 includes cable, connector and mounting threads for plug-and-play closed-loop use. Customer-inspired options support individual mounting requirements.

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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Nano-stage · Encoders
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