CVCA - Cryogenic Voice-Coil Actuator CVCA1
The cryogenic voice coil actuator (CVCA) is an electromagnetic linear force actuator for cryogenic operation. Its fully welded titanium-alloy structure incorporates electrical feedthrough pins and seals the coil for UHV compatibility. Noncontact voice coil operation is particularly suitable for smooth, precise positioning throughout the travel range and long-service-life applications such as wafer probing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Active axes [System specifications at zero position] | 1 |
| Type of motion [System specifications at zero position] | Linear |
| Actuator [System specifications at zero position] | Electromagnetic |
| Stroke s [System specifications at zero position] | 6 (-2,5 to +3,5) |
| Operating temperature T_env [System specifications at zero position；lower limit set by superconductivity of titanium] | ~5–375 K |
| Main construction material [System specifications at zero position] | Titanium, nickel plated magnetically soft steel |
| Mass coil assembly (stator) m_stator [System specifications at zero position] | 41 grams |
| Mass magnet assembly (mover) m_mover [System specifications at zero position] | 48 grams |
| Radial clearance [System specifications at zero position] | 0,35, both directions |
| Max. allowable coil temperature T_coil_max [System specifications at zero position] | 140 (180 wire specification) |
| Coil resistance R [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,0043 |
| Coil resistance R [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,18 |
| Coil resistance R [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,43 |
| Coil resistance R [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 3,58 |
| Voltage at peak force V_fp [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,009 |
| Voltage at peak force V_fp [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,35 |
| Voltage at peak force V_fp [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,81 |
| Voltage at peak force V_fp [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 7,06 |
| Current at peak force I_fp [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 2,08 |
| Current at peak force I_fp [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 1,92 |
| Current at peak force I_fp [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 1,88 |
| Current at peak force I_fp [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 1,5 |
| Back EMF constant k_BEMF [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 3,83 |
| Back EMF constant k_BEMF [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 4,17 |
| Back EMF constant k_BEMF [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 4,26 |
| Back EMF constant k_BEMF [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 4 V/m/s |
| Force sensitivity k_f [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 3,83 |
| Force sensitivity k_f [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 4,17 |
| Force sensitivity k_f [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 4,26 |
| Force sensitivity k_f [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 4 |
| Actuator constant k_a [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 58,2 |
| Actuator constant k_a [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 9,81 |
| Actuator constant k_a [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 6,43 |
| Actuator constant k_a [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 2,07 |
| Max continuous force F_cc [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；At 10K coil temperature rise] | 8 N |
| Max continuous force F_cc [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；At 10K coil temperature rise] | 5 N |
| Max continuous force F_cc [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；At 10K coil temperature rise] | 4,5 |
| Max continuous force F_cc [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；At 10K coil temperature rise] | 3 N |
| Peak force F_p [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Allowed for 10 seconds；values ≤50K limited by used current amplifier] | >8 N |
| Peak force F_p [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Allowed for 10 seconds；values ≤50K limited by used current amplifier] | >8 N |
| Peak force F_p [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Allowed for 10 seconds；values ≤50K limited by used current amplifier] | 8 N |
| Peak force F_p [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Allowed for 10 seconds；values ≤50K limited by used current amplifier] | 6 N |
| Power at peak force P_p [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,019 |
| Power at peak force P_p [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,67 |
| Power at peak force P_p [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 1,55 |
| Power at peak force P_p [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 8,4 |
| Power at max. continuous force P_cc [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,019 |
| Power at max. continuous force P_cc [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,26 |
| Power at max. continuous force P_cc [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,49 |
| Power at max. continuous force P_cc [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 2,1 |
| Power at 1N continuous force [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,0003 |
| Power at 1N continuous force [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,01 |
| Power at 1N continuous force [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,024 |
| Power at 1N continuous force [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis] | 0,23 |
| Electrical time constant τ_E [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula L/R] | 144 ms |
| Electrical time constant τ_E [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula L/R] | 3,44 |
| Electrical time constant τ_E [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula L/R] | 1,44 |
| Electrical time constant τ_E [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula L/R] | 0,17 |
| Mechanical time constant τ_M [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula (m_mover*R)/(k_f*k_BEMF)] | 0,014 |
| Mechanical time constant τ_M [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula (m_mover*R)/(k_f*k_BEMF)] | 0,5 |
| Mechanical time constant τ_M [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula (m_mover*R)/(k_f*k_BEMF)] | 1,14 |
| Mechanical time constant τ_M [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Source formula (m_mover*R)/(k_f*k_BEMF)] | 10,7 |
| Thermal resistance of coil assembly | 789 K/W |
| Thermal resistance of coil assembly | 139 K/W |
| Thermal resistance of coil assembly | 11 K/W |
| Thermal resistance of coil assembly | 2,2 |
| Thermal resistance of magnet assembly R_mover [10K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Theoretical from FEA] | 1,22 |
| Thermal resistance of magnet assembly R_mover [50K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Theoretical from FEA] | 1,22 |
| Thermal resistance of magnet assembly R_mover [77K；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Theoretical from FEA] | 1,22 |
| Thermal resistance of magnet assembly R_mover [300K (air)；Benchmark coil temperature；actual initial coil temperature at 10K tests approx.50K because of thermal resistances；10K values from analysis；Theoretical from FEA] | 1,22 |
| Coil inductance L [@100Hz；shared across benchmark temperature columns] | 0,62 |
| Controller/driver | Current amplifier |
Key Features
Datasheet
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Supplier Information
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