VML165 Mechanical-Guide Linear Stage 165-400
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Specifications
| Parameter | Value |
|---|---|
| Travel | 400 mm |
| Calibrated Accuracy | ±1.5 µm |
| Resolution | 1nm–10nm |
| Repeatability (Bi-Directional) | ±0.5 µm |
| Straightness & Flatness | ±8 µm |
| Pitchc & Yaw | 15 arc sec |
| Maximum Speed [Source has an isolated 2 marker at speed/acceleration row boundary；exponent ownership not assigned] | 2 m/s |
| Maximum Acceleration [Source has an isolated 2 marker at speed/acceleration row boundary；exponent ownership not assigned] | 30 m/s |
| Maximum Force (Continuous) | 70 N |
| Load Capacity [Horizontal] | 45 kg |
| Load Capacity [Side] | 45 kg |
| Moving Mass | 2.5 kg |
| Stage Mass | 16 kg |
| Material | Aluminum |
| MTBF (Mean Time Between Failure) | 20,000 |
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