GALMA Series Motorized Nanopositioning Stage GALMA-125-U-100
Applications: GALMA is a direct-drive nanopositioning motorized stage for fiber alignment and optimization, optical manufacturing, testing and inspection, sensor testing and qualification, semiconductor processing and inspection, and research laboratories. Structure: robust mechanics, low-friction anti-creep crossed-roller guides, an efficient ironless direct-drive motor minimizing heat, and a rigid aerospace aluminum base provide long life and consistent positioning. Precision: the high-performance, efficient ironless motor and optical encoder provide nanometer repeatability. Customization and integration: standard features and options accommodate diverse requirements and configurations, accelerate system development, and reduce design effort to improve efficiency. The source reiterates that the efficient ironless motor and optical encoder achieve nanometer repeatability. Note: accuracy is measured 25 mm above the load table. The quoted price excludes the controller.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 100mm |
| Positioning Accuracy [Accuracy specifications measured 25mm above the load platform] | ±0.2μm |
| Bidirectional positioning repeatability [Accuracy specifications measured 25mm above the load platform] | ±0.1μm |
| Resolution | 1nm |
| Minimum incremental motion | 5nm |
| Straightness [Accuracy specifications measured 25mm above the load platform] | ±1μm |
| Flatness [Accuracy specifications measured 25mm above the load platform] | ±1μm |
| Pitch [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Roll [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Yaw [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Maximum Speed | 300mm/s |
| Load Capacity | 10kg |
| Maximum Acceleration | 1g |
| Stage mass | 1.8kg |
| Platform Mass | 3.5kg |
| Material | Aluminum，7075 |
| Measurement traceability | GB/T 17421.2-2016, 5 Round Trips, ≥5Plot/L |
| Mean Time Between Failures | 23000Hours |
| Drive motor | Ironless High-Efficiency Direct-Drive Motor |
| Guidance type | Low-Friction Anti-Creep Crossed-Roller Guide |
| Position Feedback | Grating-scale closed-loop feedback |
| Vacuum Compatibility | Available |
Applications
Key Features
Datasheet
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Supplier Information
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