GALVA Series Aluminum Crossed-Roller Guide - High Precision GALVA-116-P
GALVA servo-driven vertical linear stages serve height-limited or stacked positioning, including wafer inspection, surface metrology, laser micromachining and precision manufacturing. Robust structures combine low-friction anti-creep crossed rollers, precision-ground ball screws, rigid aerospace-aluminum bases and high-performance servos for long life and consistent positioning. Optional encoders achieve submicrometer repeatability. Standard features/options and customization accelerate integration and reduce development effort. Controller excluded from quotations.
Specification Snapshot
Travel
30mm
Positioning Accuracy
±1μm
Straightness
±1μm
Maximum Speed
10mm/s
Load Capacity
4kg
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Overview
GALVA servo-driven vertical linear stages serve height-limited or stacked positioning, including wafer inspection, surface metrology, laser micromachining and precision manufacturing. Robust structures combine low-friction anti-creep crossed rollers, precision-ground ball screws, rigid aerospace-aluminum bases and high-performance servos for long life and consistent positioning. Optional encoders achieve submicrometer repeatability. Standard features/options and customization accelerate integration and reduce development effort. Controller excluded from quotations.
Specifications
| Parameter | Value |
|---|---|
| Travel | 30mm |
| Positioning Accuracy | ±1μm |
| Bidirectional positioning repeatability | ±0.2μm |
| Resolution | 50nm |
| Minimum incremental motion | 100nm |
| Straightness | ±1μm |
| Flatness | ±1.5μm |
| Pitch | 3.9arc sec |
| Roll | 3.9arc sec |
| Yaw | 3.9arc sec |
| Maximum Speed | 10mm/s |
| Maximum Acceleration | 40mm/s2 |
| Load Capacity | 4kg |
| Platform Mass | 3.3kg |
| Material | Aluminum,7075 |
| Measurement traceability | GB_T 17421.2-2016, 5 Round Trips, ≥5Plot/L |
| Mean Time Between Failures | 23000Hours |
| Note | Accuracy Specifications Measured 25 mm Above the Loaded Tabletop |
| Ordering Model Example | GALVA-116-P-30-M1-E1 / GALVA-116-P |
| Effective Travel - 30mm | 30mm Effective Travel |
| Motor Option - M1 | 50W Servo Motor, Without Brake, 20-Bit Absolute Encoder Feedback Option |
| Feedback Option - E1 | 1Vpp Sin/Cos Analog Output Signal &index, 20μm Grating Pitch |
| Drive motor | Servo Motor |
| Guidance type | Low-Friction Anti-Creep Crossed-Roller Guide |
| Lead Screw Type | Precision-Ground Ball Screw |
| Feedback Configuration [Optional] | Grating Encoder |
| Vacuum Compatibility | Available |
Key Features
Ground Ball Screw and Low-Friction Anti-Creep Crossed-Roller Guides; Excellent Geometric Performance, Minimum Incremental Motion and In-Position Stability; Grating-Scale Closed-Loop Feedback; Vacuum-Compatible Options Available.
Datasheet
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Supplier Information
Beijing Opute Technology Co., Ltd., founded in 1998, is an innovative technology company specializing in the promotion, R&D, production, and sales of optical technologies and products. Headquartered in Zhongguancun Electronic Science and Technology Park, Beijing, with branches nationwide, the company focuses on the design, development, and processing of optomechanical components, optical lenses, and optical systems, as well as the sales of precision optical instruments and the development of spectral imaging systems. With solid R&D capabilities and strong production and testing technologies, it has been certified as a High-Tech Enterprise. Adhering to the culture of 'Thinking Further Shining Future,' Opute provides high-quality products and services to meet customer application needs, striving to become a professional optomechanical component and optical instrument system integrator in China.
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