Bestda RFG series RF power supplies
An RF supply generates high-frequency alternating current to excite and control plasma. Power amplification and impedance matching efficiently transfer energy to a dynamically changing plasma load. A core high-end manufacturing device, it powers precision semiconductor etching, thin-film deposition, plasma cleaning, and related processes as an essential energy source in modern electronics.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Operating Frequency [Configuration in this row: Operating frequency 40kHz; Power 200W 500W; Options within this power cell share cooling and dimensions, not independent models] | 40 kHz |
| Power [Configuration in this row: Operating frequency 40kHz; Power 200W 500W; Options within this power cell share cooling and dimensions, not independent models] | 200/500 |
| Cooling Method [Configuration in this row: Operating frequency 40kHz; Power 200W 500W; Options within this power cell share cooling and dimensions, not independent models] | Cold Air |
| Dimensions [Configuration in this row: Operating frequency 40kHz; Power 200W 500W; Options within this power cell share cooling and dimensions, not independent models] | 85mm (height) 442mm (width) 504mm (depth) |
| Communication Interface [Configuration in this row: Operating frequency 40kHz; Power 200W 500W; Options within this power cell share cooling and dimensions, not independent models] | Analog; RS232/485 |
| Communication Interface (Optional) [Configuration in this row: Operating frequency 40kHz; Power 200W 500W; Options within this power cell share cooling and dimensions, not independent models] | DeviceNet; EtherCAT |
| Operating Frequency [Configuration in this row: Operating frequency 400kHz; Power 200W 500W 1000W 1500W 2000W 3000W; Options within this power cell share cooling and dimensions, not independent models] | 400 kHz |
| Power [Configuration in this row: Operating frequency 400kHz; Power 200W 500W 1000W 1500W 2000W 3000W; Options within this power cell share cooling and dimensions, not independent models] | 200/500/1000/1500/2000/3000 |
| Cooling Method [Configuration in this row: Operating frequency 400kHz; Power 200W 500W 1000W 1500W 2000W 3000W; Options within this power cell share cooling and dimensions, not independent models] | Air Cooling+Water Cooling |
| Dimensions [Configuration in this row: Operating frequency 400kHz; Power 200W 500W 1000W 1500W 2000W 3000W; Options within this power cell share cooling and dimensions, not independent models] | 170mm (height) 234mm (width) 596mm (depth) |
| Communication Interface [Configuration in this row: Operating frequency 400kHz; Power 200W 500W 1000W 1500W 2000W 3000W; Options within this power cell share cooling and dimensions, not independent models] | Analog; RS232/485 |
| Communication Interface (Optional) [Configuration in this row: Operating frequency 400kHz; Power 200W 500W 1000W 1500W 2000W 3000W; Options within this power cell share cooling and dimensions, not independent models] | DeviceNet; EtherCAT |
| Operating Frequency [Configuration in this row: Operating frequency 13.56MHz; Power 1250W 2500W 3000W; Options within this power cell share cooling and dimensions, not independent models] | 13.56 MHz |
| Power [Configuration in this row: Operating frequency 13.56MHz; Power 1250W 2500W 3000W; Options within this power cell share cooling and dimensions, not independent models] | 1250/2500/3000 |
| Cooling Method [Configuration in this row: Operating frequency 13.56MHz; Power 1250W 2500W 3000W; Options within this power cell share cooling and dimensions, not independent models] | Air Cooling+Water Cooling |
| Dimensions [Configuration in this row: Operating frequency 13.56MHz; Power 1250W 2500W 3000W; Options within this power cell share cooling and dimensions, not independent models] | 170mm (height) 234mm (width) 596mm (depth) |
| Communication Interface [Configuration in this row: Operating frequency 13.56MHz; Power 1250W 2500W 3000W; Options within this power cell share cooling and dimensions, not independent models] | Analog; RS232/485 |
| Communication Interface (Optional) [Configuration in this row: Operating frequency 13.56MHz; Power 1250W 2500W 3000W; Options within this power cell share cooling and dimensions, not independent models] | DeviceNet; EtherCAT |
| Frequency sweep matching time | <100 ms |
| Response Time | <10 ms |
| Pulse frequency range | 10Hz-10kHz |
Applications
Key Features
Datasheet
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Supplier Information
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