Granite series RF impedance adjusters
The RF impedance tuner adjusts electrode impedance and current in RF systems. In semiconductor plasma equipment, impedance adjustment and compensation improve etch/deposition uniformity and repeatability and increase reaction rates, supporting manufacturing yield.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Operating Frequency [Single or dual frequency optional; Different frequency units in the original table retained side by side] | 400kHz/13.56MHz/27.12MHz |
| Input Voltage | 24 VDC |
| Cooling Method | Air Cooling |
| Communication Interface (Optional) | EtherCAT |
Applications
Key Features
Datasheet
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Supplier Information
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