Diamond-like carbon DLC coating equipment HCSH-400

This series offers multiple DLC deposition technologies in a modular coater. Filtered cathodic arc, closed-field magnetron sputtering, PACVD and ion-source modules can be used individually or in combination to customer application requirements, supporting research, product development and batch production. Advanced technology, easy operation, low energy consumption and environmental friendliness support use in machinery, electronics, optics, energy and decoration. HCVAC DLC coatings provide good adhesion, high hardness and wear resistance, low friction and low roughness on metal and alloy tools, molds and components. Unique low-temperature technology also coats temperature-sensitive materials such as plastics.

Application areas: tool vacuum coating; component vacuum coating; aircraft blade vacuum coating; ta-c coating; mold vacuum coating; glc coating; tool vacuum coating; medical-device vacuum coating; automotive component vacuum coating.

Low friction reduces frictional losses. Compact footprint eases factory integration. Uniform deposition rate throughout the chamber. Easy operation and maintenance. Modular combinations of process technologies. Durable diamond-like DLC coatings. Local or remote coating-process monitoring. DLC properties: high hardness, excellent friction and wear performance, high thermal conductivity, low dielectric constant, wide bandgap, good optical transmission, chemical inertness and biocompatibility, with prospects in aerospace, machinery, electronics, optics, decorative protection and biomedicine. In wear and sliding environments, DLC reduces frictional losses without lubricating media, serving engine parts including fuel injection and powertrains, bearings, rollers, textile machinery and aerospace. DLC coatings provide stable quality, good substrate adhesion, wear resistance, low friction and corrosion resistance. Applications include engine parts, nonferrous-metal cutting tools, nonferrous-metal and stainless-steel forming/stamping dies, sliding seals, semiconductor molds, injection molds and textiles. Different processes and preparation methods tailor equipment to industries, requirements and materials. DLC characteristics: 1. Good self-lubricating coating for plastics processing. 2. Particularly dense and chemically inert, with deposited thickness 1~3μm and hardness 2000HV~2500HV. 3. Excellent friction and wear properties, temperature resistance to 350℃, and high resistance to adhesive and abrasive wear. 4. Fast, predictable demolding improves quality and productivity, making it preferred for PECVD-coated plastics processing. Integrated DLC technology. Main modules: Arc—APA (Advanced Plasma Assisted) evaporators based on cathodic vacuum arcs enable new layer structures. Advantages: high target utilization and lower target costs, high deposition rates, adjustable magnetic field, short target changes, high plasma density and excellent adhesion. HiPIMS—high-power impulse magnetron sputtering. Advantages: high ionization similar to arcs; power density from 100 to 1000 W/cm2; very high plasma density; adjustable layer structure through plasma settings; smooth coatings; excellent adhesion; dense films at low substrate temperature. Other modules: sputtering—high-energy Ar ions bombard targets, releasing atoms into the gas phase; combining materials and gases deposits coatings. Advantages: varied materials and process variables, smooth coatings and good adhesion with AEGD power etching. Nitriding—plasma nitriding in the same system and batch before PVD and/or PACVD forms a hardened support layer for later coatings. Advantages: optimized tool/component properties, replacement of costly substrates, longer life and compatibility with all PVD coatings. DLC—ultra-low-friction amorphous carbon coatings; PVD and/or PACVD produces metal-free or metal-containing carbon-based coatings. Advantages: excellent adhesion, high wear resistance, low friction and smooth surfaces. ta-C—hydrogen-free tetrahedral amorphous carbon; extremely hard, low-friction coatings. The module produces different ta-C coatings. Advantages: higher-temperature suitability than DLC, very high wear resistance, excellent adhesion and smooth coatings. Equipment configuration (HCSH-400): magnetically levitated turbomolecular pump, pulsed-bias supply, intelligent PC control. Equipment configuration (HCSH-650): magnetically levitated turbomolecular pump, pulsed-bias supply, intelligent PC control. Equipment configuration (HCSH-900): magnetically levitated turbomolecular pump ×2, pulsed-bias supply, intelligent PC control. Equipment configuration (HCSH-1800): magnetically levitated turbomolecular pump ×2, pulsed-bias supply, intelligent PC control. Technical features (HCSH-400/HCSH-650/HCSH-900/HCSH-1800): PMAⅡ EFC AEG HIPIMS online service support system.