Functional thin-film coating equipment HCEB-1350
This machine has various DLC coating deposition technology with modular design. According to your needs, it can filter cathode arc, closed field magnetron sputtering, PACVD and ion source technology modules for DLC deposition machine, which are suitable for various scientific research, product development and mass production needs. It is widely used in machinery, electronics, optics, energy, decoration and other fields with advanced technology, convenient operation, less energy consumption, green environmental protection. The DLC films developed by HCVAC has good adhesion, high hardness and wear resistance, low friction coefficient and low surface roughness. It can deposit DLC coating on various metal and alloy tools and parts. The unique low temperature coating technology can also be used to deposit DLC coating on high temperature resistant materials such as plastics.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chamber dimensions / Size | Φ1350×H1610 |
| Dome rack / DOME | Φ1200 |
| Rotational speed [Variable] | 10-30RPM (variable) |
| Film-thickness controller / Thickness Monitor | Reflective or transmissive optical film-thickness controller/quartz crystal film-thickness controller; Quartz Crystal or Optical Monitor |
| Ion source | RF/Kaufman-type/Hall-type ion source; RF/Kaufman-type /End-hall-type Ion beam Source |
| Evaporation source / Evaporation | Electron gun (dual-source co-evaporation optional), multipoint/annular crucible, impedance-type evaporation source; E-Beam Source (Dual source co steaming optional), Multi-point crucible hearth or annular hearth, Thermal source |
| Applicable wavelength / Wavelength | 300-1560 nm |
Key Features
Datasheet
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