Continuous solar cell coating production line HCINLINE-CIGS
This equipment is widely used for solar cells. Transparent conductive films serve as antireflection layers and transparent electrodes, improving conversion efficiency and reducing costs, with nontoxic, environmentally friendly and stable coatings. It also overcomes limitations on mass production in vertical lines, greatly increasing output. Large-area sputtering and a wide coater allow many substrates to be processed simultaneously, particularly for ultra-low-cost, high-productivity applications. The system also suits other small and very thin substrates. Its modular coating line can include rotating magnetrons for high-performance transparent conductive oxide films and other materials such as metals and metal oxides. Substrates can be pretreated, for example cleaned or etched, either under vacuum or before entering vacuum.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Applicable substrate | M2 and M4 silicon wafers |
| Substrate temperature | ＜150℃ |
| Thin-film uniformity | ≤±5% |
| Cycle time | 40~60s |
| Equipment utilization | ≥90% |
| Production capacity | 5000~8000pieces/hour |
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Key Features
Datasheet
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