Continuous semiconductor chip coating production line HCINLINE-EMI
This equipment coats photomask substrates and EMI packages for semiconductor chips. It includes degassing, plasma treatment and sputtering modules. A standardized, modular design enables extensive customization while balancing product specifications with low investment costs. Imported key components ensure equipment stability.
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Overview
This equipment coats photomask substrates and EMI packages for semiconductor chips. It includes degassing, plasma treatment and sputtering modules. A standardized, modular design enables extensive customization while balancing product specifications with low investment costs. Imported key components ensure equipment stability.
Specifications
| Parameter | Value |
|---|---|
| Coating Types [Vacuum Chamber Dimensions Can Be Customized to the Customer's Products and Special Process Requirements] | EMI electromagnetic-interference shielding films, decorative films, etc. |
| Power Supply Type [Vacuum Chamber Dimensions Can Be Customized to the Customer's Products and Special Process Requirements] | DC magnetron power supply + high-voltage ion bombardment power supply |
| Cylindrical target [Vacuum Chamber Dimensions Can Be Customized to the Customer's Products and Special Process Requirements] | DC magnetron target (oxygen-free copper target + stainless steel target) |
| Vacuum System [Vacuum Chamber Dimensions Can Be Customized to the Customer's Products and Special Process Requirements] | Mechanical pump + Roots pump + diffusion pump + holding pump (or optional turbomolecular pump and cryogenic system) |
| Inflation System [Vacuum Chamber Dimensions Can Be Customized to the Customer's Products and Special Process Requirements] | Mass flow controller (1-3 channels) |
| Ultimate Vacuum [Vacuum-chamber dimensions can be customized to customer products and special process requirements; Unloaded, clean chamber] | 6×10₋₄pa (unloaded, clean chamber) |
| Evacuation Time [Vacuum-chamber dimensions can be customized to customer products and special process requirements; Unloaded pump-down from atmosphere to 5×10₋₃pa] | From atmospheric pressure to 5×10₋₃pa in less than 6 minutes, unloaded |
| Control Method [Vacuum Chamber Dimensions Can Be Customized to the Customer's Products and Special Process Requirements] | Integrated manual + semiautomatic + fully automatic operation / touchscreen + PLC |
Applications
Application industries: flat-panel displays including TFT-LCD, CF, CSTN-LCD, STN-LCD, TN-LCD, EL, OLED, PDP and VFD; printed circuit boards including HDI and FPC; IC-related industries including IC Bumping, IC substrates and lead frames; precision electronic components including MENS, SENSOR and ENODER.
Key Features
Product advantages: horizontal configuration supports a wider substrate choice; uniform deposition rate throughout the chamber; excellent substrate-surface temperature control; flexible combinations of modular process technologies; customization balances product specifications with low investment costs; remote access for factory diagnostics.
Datasheet
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Supplier Information
Guangdong Huicheng Vacuum Technology Co., Ltd. is a global vacuum application solution provider, engaged in the R&D, production and sales of optical coating equipment, functional thin film coating equipment, decorative coating equipment, roll-to-roll coating equipment, automotive parts coating equipment, continuous magnetron sputtering coating production lines, ultra-high vacuum systems and other vacuum equipment, ALD atomic layer deposition equipment, semiconductor equipment, electronic production equipment, optoelectronic equipment, photovoltaic equipment, power battery equipment and related accessories. It is a national high-tech enterprise focusing on the R&D and application of equipment and product-related manufacturing processes and application technologies, control software, process control software and related production automation software, and provides technology transfer, technical consulting and technical services.
The company was founded in 2006 and has hired senior experts and senior engineers in the domestic vacuum industry to specifically guide and be responsible for the R&D and design of new products. It has obtained multiple invention, design, utility model patents and copyrights, and was successfully listed on the ChiNext Board of the Shenzhen Stock Exchange in June 2024.
HCVAC provides complete thin film deposition solutions for precision optics, optoelectronics, new energy, flat panel display, semiconductors, power devices, tooling and molds, aviation, automotive, mobile phones, hardware and other markets. From R&D to prototyping and mass production, with core technology combinations such as evaporation, sputtering, PECVD, and ALD, we can provide practical production recommendations, R&D services and custom engineering to meet customers' personalized needs.
Focusing on cutting-edge fields such as semiconductors, new energy, 5G/6G communications, IoT sensors, and artificial intelligence (AI chip packaging/CoWoS), the company has set up four major laboratories: optical thin films, functional coatings, pan-semiconductors, and new materials. It works closely with customers to develop future equipment and processes, develops new film formation technologies through investment or cooperation, and continuously improves coating equipment.
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