Ultra-hard AR+DLC +AF/AS film multichamber magnetron sputtering optical coating equipment HCSO-2550T
This equipment deposits ultra-hard AR+DLC+AF multilayer composite coatings. The coatings provide excellent optical performance as well as outstanding hardness, corrosion resistance and surface wear resistance.
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Overview
This equipment deposits ultra-hard AR+DLC+AF multilayer composite coatings. The coatings provide excellent optical performance as well as outstanding hardness, corrosion resistance and surface wear resistance.
Specifications
| Parameter | Value |
|---|---|
| Coating Area [Customizable (Data for Reference Only)] | Ф2700mm*H1950mm |
| Structure [Customizable (Data for Reference Only)] | Two-chamber structure (loading/unloading chamber + process chamber) |
| Rotational Speed [Customizable (Data for Reference Only); Variable] | 10~100RPM (variable) |
| Loading/unloading chamber pumping speed [Customizable (Data for Reference Only)] | From atmospheric pressure to 10Pa ≤5min |
| Process-chamber pumping speed [Customizable (Data for Reference Only)] | 3.0×10-3Pa≤15min |
| Ultimate Vacuum [Customizable (data for reference only); Film-formation chamber] | 8.0×10-5Pa (film deposition chamber) |
| Sputtering target material [Customizable (Data for Reference Only)] | Nb,Si,Cr,Al,Ti,In,Nb2O5,ITO,C … |
| Hanging plate [Customizable (data for reference only); Hanging-plate dimensions can be customized] | Φ2550x H1200 ~ H1800mm; Hanger plate dimensions customizable |
| Applicable Wavelength [Customizable (Data for Reference Only)] | 300nm~780nm |
Applications
Widely used for automotive displays, notebook glass panels, AR deposition on 3C front cover glass, colored and gradient-color coatings on 3C rear covers, and NCVM processing. Optical coating applications: UV cutoff filters, AR, hard AR, hard coatings, HR, AS/AF, etc., compatible with 2D/3D substrates.
Key Features
Ultra-hard AR+DLC +AF/AS coatings; Mohs hardness 7; steel-wool abrasion for 1 × ten thousand cycles, >100°. Product advantages: multilayer composite coating deposition of AR+DLC+AF/AS in one process; hard, durable ultra-hard coating (Mohs 7), resistant to wear and scratching; efficient fully automatic simultaneous loading and unloading by vacuum robot; nanometer-scale thickness precision; uniform, reliable coatings with uniformity within ±1%; high-quality deposition at relatively low temperatures for temperature-sensitive materials. Advanced configuration: RF ion-source cleaning and post-oxidation-assisted sputtering for AR deposition on automotive cover glass and 3C front cover glass. AR can use conventional SiO2+Nb2O5 or hard SiO2+Si3N4 stacks. Optional inline AF/AS system deposits AR+AF/AS and AR+DLC+AF/AS, compatible with 2D/3D substrates. Also processes colored and gradient-color coatings and NCVM coatings on 3C rear covers. Rotating cathodes significantly improve target service life and utilization over conventional planar targets. Custom substrate racks maximize product loading space. Huicheng's patented ion source offers a wide operating range, balanced energy, high ionization rate, very stable efficiency and low energy consumption. Main configuration (HCSO-2550V/HCSO-2550T): fixture system: central rotation and revolution fixture drum / hanging-plate mechanical drive; pumping system: low-vacuum pump group + high-vacuum pump group + Polycold; vacuum control: vacuum controller, Penning and Pirani gauges; coating system: DC or MF magnetron sputtering source + plasma source + inline AF/AS evaporation source; gas admission: MFC or APC automatic pressure controller; control system: PC+PLC.
Datasheet
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Supplier Information
Guangdong Huicheng Vacuum Technology Co., Ltd. is a global vacuum application solution provider, engaged in the R&D, production and sales of optical coating equipment, functional thin film coating equipment, decorative coating equipment, roll-to-roll coating equipment, automotive parts coating equipment, continuous magnetron sputtering coating production lines, ultra-high vacuum systems and other vacuum equipment, ALD atomic layer deposition equipment, semiconductor equipment, electronic production equipment, optoelectronic equipment, photovoltaic equipment, power battery equipment and related accessories. It is a national high-tech enterprise focusing on the R&D and application of equipment and product-related manufacturing processes and application technologies, control software, process control software and related production automation software, and provides technology transfer, technical consulting and technical services.
The company was founded in 2006 and has hired senior experts and senior engineers in the domestic vacuum industry to specifically guide and be responsible for the R&D and design of new products. It has obtained multiple invention, design, utility model patents and copyrights, and was successfully listed on the ChiNext Board of the Shenzhen Stock Exchange in June 2024.
HCVAC provides complete thin film deposition solutions for precision optics, optoelectronics, new energy, flat panel display, semiconductors, power devices, tooling and molds, aviation, automotive, mobile phones, hardware and other markets. From R&D to prototyping and mass production, with core technology combinations such as evaporation, sputtering, PECVD, and ALD, we can provide practical production recommendations, R&D services and custom engineering to meet customers' personalized needs.
Focusing on cutting-edge fields such as semiconductors, new energy, 5G/6G communications, IoT sensors, and artificial intelligence (AI chip packaging/CoWoS), the company has set up four major laboratories: optical thin films, functional coatings, pan-semiconductors, and new materials. It works closely with customers to develop future equipment and processes, develops new film formation technologies through investment or cooperation, and continuously improves coating equipment.
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