Magnetron sputtering optical coating equipment HCSO-1800

Magnetron sputtering optical coating equipment HCSO-1800

Supplier
Hcvac
Part Number
HCSO-1800
Category
Optical Coatings
Origin
China

Antireflection and colored coatings. AR coatings (substrate glass transmittance >91.5%): in the 420-680nm band, single-sided average transmittance >95% and reflectance less than 0.5% (average); double-sided average transmittance >98% and reflectance less than 0.5% (average). Colored or gradient-color coatings: based on customer samples, with loading at random positions or full loading for five consecutive batches, color difference ΔE<1.2. Water-boil test: water at 80℃ for 30min, followed by a 3M cross-hatch test (1*1mm), with a result greater than 4B.

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Overview

Antireflection and colored coatings. AR coatings (substrate glass transmittance >91.5%): in the 420-680nm band, single-sided average transmittance >95% and reflectance less than 0.5% (average); double-sided average transmittance >98% and reflectance less than 0.5% (average). Colored or gradient-color coatings: based on customer samples, with loading at random positions or full loading for five consecutive batches, color difference ΔE<1.2. Water-boil test: water at 80℃ for 30min, followed by a 3M cross-hatch test (1*1mm), with a result greater than 4B.

Specifications

ParameterValue
Coating Area [Customizable (Data for Reference Only)]Φ1800x H1400mm
Structure [Customizable (Data for Reference Only)]Vertical, front-opening door, SUS304 stainless steel
Rotational Speed [Customizable (Data for Reference Only); Variable]10~100RPM (variable)
Film-formation chamber pumping speed [Customizable (Data for Reference Only)]3.0×10-3Pa≤30min
Ultimate Vacuum [Customizable (Data for Reference Only)]1.0×10-4Pa
Sputtering target material [Customizable (Data for Reference Only)]Nb,Si,Cr,Al,Ti,In,Nb2O5 …
Applicable Wavelength [Customizable (Data for Reference Only)]380nm~780nm
AR coating - Single-sided average transmittance [Base Glass Transmittance >91.5%; Wavelength Band 420-680nm]>95%
AR coating - Single-sided reflectance [Base Glass Transmittance >91.5%; Wavelength Band 420-680nm]Less Than 0.5 (Average Value)%
AR coating - Double-sided average transmittance [Base Glass Transmittance >91.5%]>98%
AR coating - Double-sided reflectance [Base Glass Transmittance >91.5%]Less Than 0.5 (Average Value)%
Color or gradient-color coating - Color difference ΔE [Based on the customer's sample; specimens loaded at random positions or at full load in five consecutive furnace runs]<1.2
Color or gradient-color coating - Boiling-water test [After water-boiling at 80℃ for 30min and a 3M cross-hatch test (1*1mm)]Greater than 4B

Applications

AR, AS/AF, NCVM, hard coatings, decorative coatings, HR coatings, etc.

Key Features

Product advantages: compact footprint for easy factory integration; patented ion source independently developed by Huicheng; precise thickness monitoring; low-temperature deposition below 70℃; automatic gas-flow adjustment; simple operation and maintenance. Advanced configuration: rotating cathodes significantly improve target service life and utilization compared with conventional planar targets. Custom substrate workpiece racks maximize product loading space. A fully automatic integrated lifting and lowering rack reduces door opening and closing time, improving productivity and process stability. Huicheng's patented ion source offers a wide operating range, balanced energy, high ionization rate, very stable efficiency and low energy consumption. Timed thickness control meets process requirements and saves quartz-crystal and optical monitoring steps and consumables. High-index nitride coatings improve hardness; low-temperature deposition supports varied uses. A patented automatic gas-flow adjustment device maintains stable target voltage and coating quality. Optional external correction-plate adjustment mechanism. Multiple cylindrical targets on the sidewall improve deposition rate and multilayer coating capability. The system has circular cathodes powered by pulsed DC or RF; vertically mounted substrates and cylindrical cathodes minimize particle contamination. Main configuration (HCSO-2100/HCSO-1800/HCSO-1300): fixture system: bottom-center rotation and revolution mechanism / complete insertion and removal or split hanging plates; pumping system: mechanical pump + Roots pump + turbomolecular pump + cryopump / Polycold; vacuum control: vacuum controller, Penning and Pirani gauges; coating system: DC/MF magnetron sputtering source + DC/ICP plasma source + impedance-type evaporation source / inline AF/AS evaporation source; gas admission: MFC or APC automatic pressure controller; thickness controller: quartz-crystal or optical control; control system: PC+PLC.

Datasheet

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Supplier Information

Guangdong Huicheng Vacuum Technology Co., Ltd. is a global vacuum application solution provider, engaged in the R&D, production and sales of optical coating equipment, functional thin film coating equipment, decorative coating equipment, roll-to-roll coating equipment, automotive parts coating equipment, continuous magnetron sputtering coating production lines, ultra-high vacuum systems and other vacuum equipment, ALD atomic layer deposition equipment, semiconductor equipment, electronic production equipment, optoelectronic equipment, photovoltaic equipment, power battery equipment and related accessories. It is a national high-tech enterprise focusing on the R&D and application of equipment and product-related manufacturing processes and application technologies, control software, process control software and related production automation software, and provides technology transfer, technical consulting and technical services. The company was founded in 2006 and has hired senior experts and senior engineers in the domestic vacuum industry to specifically guide and be responsible for the R&D and design of new products. It has obtained multiple invention, design, utility model patents and copyrights, and was successfully listed on the ChiNext Board of the Shenzhen Stock Exchange in June 2024. HCVAC provides complete thin film deposition solutions for precision optics, optoelectronics, new energy, flat panel display, semiconductors, power devices, tooling and molds, aviation, automotive, mobile phones, hardware and other markets. From R&D to prototyping and mass production, with core technology combinations such as evaporation, sputtering, PECVD, and ALD, we can provide practical production recommendations, R&D services and custom engineering to meet customers' personalized needs. Focusing on cutting-edge fields such as semiconductors, new energy, 5G/6G communications, IoT sensors, and artificial intelligence (AI chip packaging/CoWoS), the company has set up four major laboratories: optical thin films, functional coatings, pan-semiconductors, and new materials. It works closely with customers to develop future equipment and processes, develops new film formation technologies through investment or cooperation, and continuously improves coating equipment.

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