High Precision Air Bearing Rotation Stage RAF-85C*
High Precision Air Bearing Rotation Stage Designed with closed air conditioners , Direct drive. Drive , Circle Grating Closed loop feedback , Achieving high resolution 、 High Precision Movement control 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | θX |
| Sensor Type | Grating Encoder |
| Travel | 360 ° |
| Repeated location. | ≤20 μrad |
| Run-off | ±75 nm |
| End Jump | ±35 nm |
| Linearity | 0.05% |
| Self Weight | 1544 g |
| Dimensions | 150 mm × 150 mm × 96 mm |
| Material | Stainless Steel |
| Fit Controller | Digital Servo Controller NPC-031 |
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Key Features
Datasheet
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Supplier Information
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