X Axis Nano Positioning / Scanning Stage NP-ST-X-100
X Axis Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Internal Capacitive Transfer Sensor , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。 Support product development and development for different applications and needs Custom 。
Specification Snapshot
Sensor Type
Capable Sensors
Resolution
0.35
Repeatability
1 nm
Material
Aluminum Alloy / Titanium Alloy
Dimensions
55 mm × 45 mm × 18.3 mm
Operating Temperature
-20-80 ℃
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Overview
X Axis Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Internal Capacitive Transfer Sensor , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。 Support product development and development for different applications and needs Custom 。
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X |
| Sensor Type | Capable Sensors |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | 100 um |
| Resolution | 0.35 |
| Repeatability | 1 nm |
| Maximum Load | 1 kg |
| None Loading tuned frequency | 400~500 Hz |
| Material | Aluminum Alloy / Titanium Alloy |
| Dimensions | 55 mm × 45 mm × 18.3 mm |
| Vacuum | Super vacuum compatible. 5X10⁻⁹ (mBar) Optional |
| Self Weight | 208 g |
| Electrical Interface | D-sub9 |
| Operating Temperature | -20-80 ℃ |
| Recommendations Controller / Driver | Digital Servo Controller NPC-031/ Nano. Servo Controller APS-203 |
Applications
Optical alignment. Nanoprint Microscopic Imaging / Manipulation Grating Writing Double photomeric Optical migration Wafer Test Surface detection Measuring Techniques Semiconductor Process
Key Features
Super tall. Positioning Accuracy High Dynamic Performance Multimotor Mode : Positioning / Scan It's a very high vacuum. None Equivalent chain orientation
Datasheet
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Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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