High Speed Tip/Tilt Stage NPV-R-10B
High Speed Tip/Tilt Stage Based on Voice Coil Motor Drive and High Precision Orientation Module Positioning nanoscale super-high resolution / Scan Line Movement ， Realizable Process ± 2° Pitch Adjustment of 。 Internal Grating Offset Sensor ， The structure is tight. ， Excellent closed-ring control through self-developed high-performance nanoserving systems ， He's got nanoscale motion resolution and motion accuracy. ， And it's also high speed. 、 High Dynamic Performance Precision pointer and scan function 。 Support product development and development for different applications and needs Custom 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axis | θX |
| Sensor Type | Grating Sensor |
| Drive Type | Voice Coil Motor |
| Turn range | ±2 ° |
| Back to the center. | 70±0.1 mm |
| Load capacity | ≥60 N |
| Repeatability | ≤0.001 nm |
| Dimensions | 75 mm × 90.8 mm × 59 mm |
| Operating Temperature | 10-50 ℃ |
| Material | Aluminum Alloy / Titanium Alloy |
| Noise （ Here. 1.5 degrees 6Hz Test / Dembets ） | ≤65 |
| Recommendations Controller / Driver | Digital Servo Controller NPC-031/ Nano. Servo Controller APS-20302 |
Applications
Key Features
Datasheet
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