Heavy Load Z Axis Nano Positioning / Scanning Stage NP-ST-Z-100

Heavy Load Z Axis Nano Positioning / Scanning Stage NP-ST-Z-100

Supplier
Attomotion
Part Number
NP-ST-Z-100
Category
Positioner
Origin
China

Heavy Load Z Axis Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Offset Scan function 。 Support product development and development for different applications and needs Custom 。

Specification Snapshot
Sensor Type
Capable Sensors
Resolution
0.35 nm
Resonant Frequency
800(@ None Load )
Material
Aluminum Alloy / Titanium Alloy
Dimensions
90 mm × 36.5 mm × 90 mm
Operating Temperature
-20~80 ℃
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Overview

Heavy Load Z Axis Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Offset Scan function 。 Support product development and development for different applications and needs Custom 。

Specifications

ParameterValue
Number of motion axes1
Sensor TypeCapable Sensors
Drive TypePiezoelectric Ceramic
Closed cycle100 um
Resolution0.35 nm
Minimum Step length0.5 nm
Resonant Frequency800(@ None Load )
Maximum Load5 kg
MaterialAluminum Alloy / Titanium Alloy
Dimensions90 mm × 36.5 mm × 90 mm
Self Weight685 g
Electrical InterfaceD-sub9
VacuityVacuum Compatibility 5X10⁻⁹ (mBar) Optional
Operating Temperature-20~80 ℃
Fit ControllerDigital Servo Controller NPC-031/ Nano. Servo Controller APS-203

Applications

Optical alignment. Nanoprint Microscopic Imaging / Manipulation Grating Writing Double photomeric Optical migration Wafer Test Surface detection Measuring Techniques Semiconductor Process

Key Features

Super tall. Positioning Accuracy High Dynamic Performance Multimotor Mode : Positioning / Scan It's a very high vacuum. None Equivalent chain orientation

Datasheet

Product Datasheet
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Supplier Information

At
Attomotion
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Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions. The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.

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Heavy Load Z Axis Nano Positioning / Scanning Stage NP-ST-Z-100
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