Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform HEXAPOD H-SM-264*
Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform Multi-Liberal Movement , Dynamic Large range , Carrying large stability , Any Center to Move , Meeting various industrial needs , Adaptation to atmosphere and vacuum 。 Extensively applied to micro-managing 、 Biotechnology 、 Semiconductor Manufacturing etc. 。
Specification Snapshot
Sensor Type
Grating Sensor
Resolution
X/Y/Z:<1μm θX/θY/θZ:17μrad
Repeatability
X/Y/Z:1μm θX/θY/θZ:10μrad
Material
Aluminum Alloy
Dimensions
Φ415 mm × 260 mm
Operating Temperature
0-50 ℃
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Overview
Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform Multi-Liberal Movement , Dynamic Large range , Carrying large stability , Any Center to Move , Meeting various industrial needs , Adaptation to atmosphere and vacuum 。 Extensively applied to micro-managing 、 Biotechnology 、 Semiconductor Manufacturing etc. 。
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X, Y, Z, θX, θY,θZ |
| Sensor Type | Grating Sensor |
| Drive Type | Stepper Motor |
| Closed cycle | X/Y/Z:6/6/10mm θX/θY/θZ:±4°/±4°/±3° |
| Resolution | X/Y/Z:<1μm θX/θY/θZ:17μrad |
| Repeatability | X/Y/Z:1μm θX/θY/θZ:10μrad |
| Maximum Load | 20( Horizontal );20( Invert ) |
| Material | Aluminum Alloy |
| Dimensions | Φ415 mm × 260 mm |
| Quality | 18.3 kg |
| Operating Temperature | 0-50 ℃ |
Applications
Semiconductor Seal Visual assembly Active Optical Micro-manipulation Biotechnology Optical Fiber Calibration
Key Features
Super tall. Positioning Accuracy Multi-Liberal Movement Dynamic Large range Carrying large stability Any Center to Move Meeting various industrial needs Adaptation to atmosphere and vacuum
Datasheet
Product Datasheet
PDF
Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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