Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform HEXAPOD H-SM-264*

Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform HEXAPOD H-SM-264*

Supplier
Attomotion
Part Number
HEXAPOD H-SM-264*
Category
Motors and Drives
Origin
China

Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform Multi-Liberal Movement , Dynamic Large range , Carrying large stability , Any Center to Move , Meeting various industrial needs , Adaptation to atmosphere and vacuum 。 Extensively applied to micro-managing 、 Biotechnology 、 Semiconductor Manufacturing etc. 。

Specification Snapshot
Sensor Type
Grating Sensor
Resolution
X/Y/Z:<1μm θX/θY/θZ:17μrad
Repeatability
X/Y/Z:1μm θX/θY/θZ:10μrad
Material
Aluminum Alloy
Dimensions
Φ415 mm × 260 mm
Operating Temperature
0-50 ℃
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Overview

Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform Multi-Liberal Movement , Dynamic Large range , Carrying large stability , Any Center to Move , Meeting various industrial needs , Adaptation to atmosphere and vacuum 。 Extensively applied to micro-managing 、 Biotechnology 、 Semiconductor Manufacturing etc. 。

Specifications

ParameterValue
Axes of motionX, Y, Z, θX, θY,θZ
Sensor TypeGrating Sensor
Drive TypeStepper Motor
Closed cycleX/Y/Z:6/6/10mm θX/θY/θZ:±4°/±4°/±3°
ResolutionX/Y/Z:<1μm θX/θY/θZ:17μrad
RepeatabilityX/Y/Z:1μm θX/θY/θZ:10μrad
Maximum Load20( Horizontal );20( Invert )
MaterialAluminum Alloy
DimensionsΦ415 mm × 260 mm
Quality18.3 kg
Operating Temperature0-50 ℃

Applications

Semiconductor Seal Visual assembly Active Optical Micro-manipulation Biotechnology Optical Fiber Calibration

Key Features

Super tall. Positioning Accuracy Multi-Liberal Movement Dynamic Large range Carrying large stability Any Center to Move Meeting various industrial needs Adaptation to atmosphere and vacuum

Datasheet

Product Datasheet
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Supplier Information

At
Attomotion
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Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions. The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.

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Stepper Motor H-SM Series Six Degree of Freedom Parallel Motion Platform HEXAPOD H-SM-264*
Attomotion · Motors and Drives
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