Five Axis Heavy Load Piezoelectric Nano Positioning Stage NP-ST-FAC-5011A
Heavy Load Five degrees of freedom. Piezoelectric Platform based on Microsoft institutions and Piezoelectric Executor achieves ultra-high resolution nanoactivity ， Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X, Y, Z, θX, θY |
| Sensor Type | Capable Sensors |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | XY:100μm Z:40μm θXθY:±150μrad |
| Resolution | XY:＜2nm Z:＜1nm θXθY:＜20nrad |
| Linearity | XY: 0.03% Z: 0.03% |
| Repeatability | XY:＜10nm Z:＜10nm θXθY:0.1μrad |
| Maximum Load | 35 kg |
| Platform Noise | ＜2 |
| Resonant Frequency @35Kg | Z:＞100Hz θXθY:＞100Hz |
| Material | Aluminum Alloy / Titanium Alloy |
| Dimensions | Φ500x117 Medium Φ360 |
| Load maximum working frequency | 10 Hz |
| Operating Temperature | 0-50 ℃ |
| Fit Controller | Nano. Servo Controller APS-203010101 |
Applications
Key Features
Datasheet
Supplier Information
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