Silicon Single Crystal Wafer Orientation Instrument 7AS
DX-7A silicon single-crystal wafer orientation instrument (7AC, 7AS and 7AZ types). It measures angles of cut silicon single-crystal wafer surfaces and reference faces and can also measure wafers of other single-crystal materials. The instrument includes a suction pump and accommodates wafers 3-8 inches in diameter, with measurable crystal planes including 100, 110, 111 and 210. Its two worktables can perform the same task simultaneously or measure the wafer surface and reference face separately, with configurations available to user requirements.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Input Power [50Hz] | Single-stage communication 220V, 50Hz, 0.3KW. |
| Plumb voltage. | 30 kV |
| Tube Current [Consequences.] | 0-5mA continuous |
| Receiver | Geiger counter, working voltage high DC1050V |
| X-Ray Tube | Copper target, fan cooling, anode grounding. |
| Angle | 2θ=－10～120°，θ=－5～60°。 |
| Consolidated precision [Measured using the 10ī1 face of a standard quartz plate] | ±30″ (measured using the 10ī1 face of a standard quartz plate) |
| Small readings | 1 ″ |
| Dimensions | 1290 (length) x 772 (width) x 1300 (height) mm |
| Instrument Weight | 300kg。 |
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