PDS-160 Ion Source

PDS-160 Ion Source

Supplier
Javac-tech
Part Number
PDS-160
Category
Material-based Production Equipment
Origin
China
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Specifications

ParameterValue
Anode temperature1500 ℃
Heating power3.0 kW
Power the current.50 A
EMPLE THREE150 V
Power discharge10 kW
Filling aqueous vacuum pressure2*10⁻²pa
Aerobic vacuum pressure. [Oxygen.]4*10⁻²pa
Ar's ion current density.0.5 mA/cm²
Ar+O2 ion current density1 mA/cm²
Ion Energy20eV-200eV

Key Features

A stable, completely dense film, a stable plasma distribution/density, a neutral plasma height, a low temperature plating film, a higher concentration, low cost of running.

Datasheet

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Supplier Information

Ja
Javac-tech
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Shanghai JAVAC Vacuum Technology Co., Ltd. was established in November 2007. In the early days of its establishment, the company mainly engaged in OEM manufacturing services related to high-vacuum optical thin-film deposition equipment. Its products cover vacuum chambers, various valves, high-vacuum diffusion pumps, and various vacuum components. So far, it has established OEM business relationships with many top vacuum equipment manufacturers in the world and has achieved outstanding results through cooperation with multiple parties.

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PDS-160 Ion Source
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