QLED Exposure Machine Glovebox
A micro/nanofabrication and device-preparation platform integrating ultraclean space, inert-gas protection and a precision exposure machine. It performs core processes from substrate to complete optoelectronic devices such as QLEDs in a moisture-free, oxygen-free environment with almost no particle contamination. Class 10 purification prevents particle-induced short circuits, pinholes and defects; the inert atmosphere protects QLED emissive materials and sensitive metal electrodes from oxidation and deliquescence. Precision photolithography is integrated directly into this dual-protection environment for an exposure-free patterning workflow, accommodating sensitive materials and complex processes. Seven glove ports allow multiple researchers to perform different steps in parallel or transfer large substrates between functional modules in a production-line sequence, improving development efficiency and flexibility. Internal chamber dimensions: 1800 mm × 2740 mm × 1600 mm; the top FFU is removable for transport. Front window: removable 8 mm safety-tempered glass, resistant to wear and corrosion with good light transmission; 3/8-inch-thick 0MEGA seal. Glove ports: 220 mm diameter, hard aluminum alloy resistant to corrosion in organic atmospheres. Lighting: yellow and white sources, switchable at any time. Leakage rate <0.001Vo1%/h. The chamber floor uses steel plate at least 10 mm thick. Feet and transport wheels are removable so the glovebox floor can rest directly on a raised floor. Operating pressure: -12 mbar to 12 mbar, with automatic protection above a certain pressure. Internal electrical provisions reserve interfaces for exposure-machine test wiring and coordinate lead/gas-line connections and potted seals with the exposure-machine manufacturer. Several standard KF-40 ports accommodate liquids, gases, signals and other connections. Height including casters is 350 mm; casters provide leveling, movement and locking. A safety valve protects the glovebox and internal substrates. One safety light curtain and static-elimination bar are added at the front workstation. Windows and maintenance doors are reserved according to the technical plan. Large antechamber: cylindrical 304 stainless steel, flange-connected to the glovebox. The large T-shaped antechamber is 360 mm in diameter and 700 mm long, with automatic valves for evacuation/refill and a selectable number of automatic cycles to reduce waiting time. Vacuum ≤-0.1 MPa, with evacuation indication and a German Wika pressure gauge. Small antechamber: 150 mm diameter × 300 mm, manual evacuation/refill valves; vacuum ≤-0.1 MPa with evacuation indication and a German Wika gauge. The large antechamber has a freely movable, extendable polished tray, easily removable for bulky-material transfer; the small unit has a movable sliding tray. Solvent filtration: an external organic-solvent adsorption column is integrated in series to protect the purification column and prevent experimental cross-contamination. It removes volatilized solvents using 8 KG of high-quality, high-efficiency activated carbon. Oxygen analyzer: imported U.S. Avcray electrochemical instrument, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Ranges 0–10, 100, 1000 and 10000 ppm, automatically switched according to the measured value. Alternative: GE oxy.IQ™ Oxygen Transmitter. Moisture analyzer: imported British MICHELL, selected according to the customer's operating environment, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Range is stated as 0–10000pm. Alternative: GE VeriDri™ Dew-Point Transmitter. Class 10 high-efficiency clean purification/circulation: imported filters and a clean-environment filtration system bring the controlled chamber environment to Class 10 cleanliness, including a static ionizing bar. Stated compliance: GB50591-2010, Code for construction and acceptance of cleanrooms, and GB/T25915.3-2010, Cleanrooms and associated controlled environments. Product certifications stated: ISO9001, CE and UL. Warranty: one year, with lifetime repair service. Application precautions: consult the Danger, Warning, Caution and related sections of the instruction manual.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Box - Internal Size | 1800mm×2740mm×1600mm |
| Box - Volume | 7.9 m³ |
| Box - Front Window | A broken 8mm secure steel front window, resistant to grinding, corrosive, light-transforming. |
| Boxes - Front Window - Seal Circle | 3/8-inch-thick0MEGA seal |
| Boxes - Gloves | 8 in |
| Box - Glove mouth - diameter | 220 mm |
| Boxes - Glove mouths - material | Duralumin Alloy |
| Boxes - Gloves - Materials | Original butyl rubber imports, United States |
| Box - Glove - Thickness | 0.4 mm |
| Boxes - Lighting | Yellow light, white light source, ready to switch |
| Boxes - leakage rate | <0.001Vo1%/h |
| Box - Base steel | No less than 10 mm steel plate |
| Box - Positive and Negative Pressure | -12mbar—12mbar |
| Boxes - Interfaces | Standard KF-40 Interface |
| Boxes - high-bearing wheel | - A ton wheel, 350 mm high. |
| Transition class -- large transition class -- materials | Cylinder (304 stainless steel) |
| Transition class -- large transition module -- connectivity [Between the barn and the glove box.] | Frank connection. |
| Transition class-T-large transition class-diameter | 360 mm |
| Transition class - large T-phase transition class - long | 700 mm |
| Transition class -- large transition module -- vacuum | ≤-0.1 MPa (with vacuum belts in both) |
| Transition class -- small transition module -- materials | SUS304 stainless steel |
| Transition class - small transition module - thickness | 3 mm |
| Transition class -- small transition class -- size | 150 mm in diameter × 300 mm |
| Transition class -- small transition module -- vacuum | ≤-0.1 MPa (with vacuum belts in both) |
| Solvent filtering system - medium | Quality, high-efficiency, active carbon |
| Solvent filtering system - Filling | 8 KG |
| Analyzers - oxygen analysers - dimensions | 205 mm（L） x 80 mm（W） x 60 mm（H） |
| Analyzers - oxygen analysers - range measurement [Auto-toggle from actual values] | 0–10, 100, 1000, 10000 ppm (automatically switches according to the measured value) |
| Analyzer-water analyser-size | 205 mm（L） x 80 mm（W） x 60 mm（H） |
| Analyzers - hydrometric analysers - range of measurements | 0-10000 pm |
| Clean and efficient clean cycle system - cleanness | 10 级 |
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