Full auto lamp plating equipment
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Specifications
| Parameter | Value |
|---|---|
| Vacuum container size | φ1600×2000mm (SUS304 stainless steel) |
| Fixture swing diameter, number, length | 6/8 axes, φ440 L=1700 |
| Vacuum index [Maximum vacuum: constant temperature, airborne, clean conditions; restoration vacuum: empty] | 1) Ultimate vacuum at room temperature, no load and clean conditions: ≤3.0×10-4Pa. 2) Vacuum recovery: pump from atmosphere to 2.0×10-2 Pa in ≤7 minutes, no load. 3) Pumping rate: ≥25000L/S. 4) Static leakage rate: <5×10-3 Pa/S. 5) Atmospheric backfill time: <2 min. |
| evaporation source [AC6-12V: Reconciling] | 1) Resistance heating, power ≥30kw, adjustable AC6~12V; control by a thyristor (SCR) voltage-control module or transformer. 2) Evaporation electrodes: tungsten wire, 17~24 groups/set. |
| Silicon oil protection film overlap [DC0-6000V, 0-2A: Moable] | 1) Silicone oil storage tank and filling-pipe material: SUS304 stainless steel. 2) Tank volume: ≥20L, with visual and level gauges, a heater and a temperature sensor to maintain the set constant temperature; temperature up to 50 degrees. 3) The silicone oil storage tank has an observation window. 4) DC plasma overlap method, with adjustable DC0~6000V and 0~2A. |
| Silicon oil flow control | Use needle valve control/ Using needle valve control |
| Ar filling system | 1) Filling pipe: SUS304 stainless steel; Filled piece: SUS304 reports steel; 2) Mass flow controller; Mass blow control |
| Installed power | ～100KW |
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